RORZE

RORZE is conducting research and development of safer and more efficient transfer methods by utilizing data obtained from multiple devices in the tool. As a specific example of our efforts, our new transfer robot, scheduled for release in the spring of 2024, is equipped with a camera in its hand. This camera is a proprietary, high-resolution, compact device with a variable focus lens that can clearly capture a variety of objects within the tool. At this exhibition, we will demonstrate the following two functions that will be incorporated in the new robot -Fully automatic auto-teaching

Teaching tasks previously handled by field engineers will be automated. A camera mounted on the robot hand recognizes the fixture placed on the stage, guides the robot to the appropriate position, and determines the teaching position fully automatically. It also detects abnormal conditions such as a closed port door of the load port from the camera image to prevent accidents caused by human error. -Transfer Monitoring & Recording The wafer transfer process is monitored and recorded in real time. In the event of a robot error or other abnormality, the system protects the video footage at that moment. High-definition video allows for a detailed understanding of conditions during transfer, making quality control and troubleshooting more effective.

Wafer transfer tool is full of a variety of data. For example, fan noise, vibration, temperature and humidity inside the tool, power consumption, and robot position and speed are just a few examples.

Since we design and manufacture all major components of wafer transfer systems, such as EFEMs, robots and load ports, in-house, it is easy to collect data for abnormality detection, enabling us to detect abnormalities specific to the environment of wafer transfer systems.

By collecting data from numerous sensors installed in the tool and detecting conditions that differ from normal operation, we can prevent failures and stoppages.

We have also developed our own unique sensors, for example, a proximity sensor that measures the distance between the robot hand and the object being conveyed. By combining these unique sensors with AI, we can achieve more effective abnormality detection.