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Lasertec

Shin-yokohama Kohoku~ku, Yokohama,  Kanagawa 
Japan
https://www.lasertec.co.jp
  • Booth: 4437


Providing solutions to your measurement and inspection needs

At this year’s SEMICON Japan, we will introduce our newly announced products and provide the latest information about our wide-ranging EUV lithography-related products, mainstream mask and mask blank inspection systems, and wafer-related inspection systems. We will also have live demonstrations of hybrid laser microscopes. Our staff are standing by to hear your specific measurement and inspection needs and address your need to find the right solution from our standard and customized models including prototypes with special stages, and models for use in production lines. Please be sure to stop by our booth.


 Products

  • ACTIS A300 Series
    Enabling detection of printable defects and through-pellicle inspection of high-NA EUV masks...

  • Applications

    • Quality assurance inspection during EUV mask manufacturing processes
    • Incoming EUV mask inspection and periodic quality assurance inspection at wafer fabs
  • Via Depth Measurement System VIANCA Series
    Measuring the depth of small-diameter, high-aspect-ratio vias for 3D / 2.5D / Hybrid bonding packaging processes...

  • Applications

    ・Depth measurement after via etching
    ・Copper recess level control for hybrid bonding
    ・Height measurement after copper pillar revealing and during bump formation