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KLA-Tencor’s SensArray SensorWafers & VLSI Standards
KLA-Tencor’s SensArray SensorWafers, http://www.kla-tencor.com/chip-insituprocess.html, provide unique wired and wireless solutions to monitor the effect of the process environment on production wafers. VLSI Standards, http://www.vlsistandards.com/index.asp, designs and manufactures an extensive array of calibration products in the form of standards and references.