Full Family of Innovative Ion Implant Solutions
Axcelis Technologies is a global leader in innovative semiconductor manufacturing equipment and services. For over 45 years, chipmakers around the globe have relied on Axcelis’ innovative systems and process expertise. Our goal is to accelerate the pace of innovation in these markets and shape the future of the digital revolution
At Axcelis, we have a single goal: to help semiconductor manufacturers achieve the highest quality and yield, with the lowest cost of ownership. In all that we do, our singular strategy is to align every Axcelis innovation and success with our customers’ goals, strive to understand the entirety of their challenges, and stand ready to deliver the technology, service, and support they need.
We understand that different semiconductor applications pose their own unique ion implantation challenges. We combine industry-leading technical expertise in fab process optimization with the most advanced ion implant technologies to deliver practical solutions tailored to the specialized needs of distinct market segments, including power devices, image sensors, mature process technology, memory and logic devices.
Our Purion product family, our flagship implant platform, includes the Purion H™ series high current, the Purion M™ series medium current, the Purion H200 series medium energy, and the Purion XE™ series high energy implanters. For mature process technology applications, semiconductor manufacturers can rely on Axcelis to provide a full range of 100 to 200mm substrate products designed to add process capabilities and boost your manufacturing capacity. The Axcelis GSD™ Series platform is the industry benchmark for multiwafer implanter productivity.