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PIVOTAL SYSTEMS KOREA

Hwaseong-si,  United States
http://www.pivotalsys.com
  • Booth: W108

Welcome and please stop by our booth #W108

Overview

Pivotal Systems provides the best-in-class gas flow monitoring and control technology platform for the global semiconductor industry. The company’s proprietary hardware and software utilizes advanced machine learning to enable preventative diagnostic capability resulting in an order of magnitude increase in fab productivity and capital efficiency for existing and future technology nodes. 

The platform includes Pivotal’s Gas Flow Controller (GFC) product lines that offer industry leading speed down to ≤ 10msec on/off and high-accuracy, real-time monitoring and control of the most critical parameters difficult to control in wafer processing today: Gas Flow and Chamber Condition.

IDMs, foundries and OEMs use Pivotal’s products to dramatically improve yield and productivity by avoiding catastrophic scrap events, tightening process windows and matching chambers more effectively.  To meet strong industry demand, Pivotal Systems now operates high-capacity manufacturing facilities in the United States and Korea, and the company has annually doubled its total unit production each year since 2014.

  Products

  • GFC (Gas Flow Controller)
    The industry's best flow accuracy for the entire flow range. Fastest flow time: <100ms standard and <50ms optional upgrade. Self-calibrating: drift-free and no maintenance required....

    • Pivotal Systems’ GFC-S paves the way for the future of gas flow control. The GFC combines Pivotal’s patented, high accuracy GFM system with patented control valve technology. As such, it leapfrogs the current MFC technology by offering an order of magnitude improvement on key flow metrics, thereby enabling advanced wafer-manufacturing processes. At Pivotal Systems, we aim to significantly enhance fab productivity and capital efficiency by utilizing our innovative solutions.

    • Powered by productivity

    Pivotal’s products offer the most advanced gas flow control features in the industry, ranging from zero drift to no leak by, our engineers design for precision and excellence. Our GFC combines Pivotal’s patented, high accuracy GFM™ system with patented control valve technology giving you the unrivaled results.

    • Features

     - Flow accuracy +/- 0.5% of Setpoint
     - Response time <50ms*
     - Machine Learning used to update valve positioning
     - Open flow path with no small orifices or capillary tubes

    • Benefits

     - Zero drift
     - Calibration and maintenance free
     - Exceptional corrosive gas performance
     - Unparalleled diagnostics available

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