Mask / Reticle
Mask Dry Etcher, CD / Overlay Metrology, Defect Inspection, E-beam Writer, Reticle Cassette
Lithography Process
Stepper, Coater / Developer, Mercury Lamp
Etch Process
Dry Etcher, Plasma Cleaning / Descum, End Point Detection
Thin Film & Plating Process
Electro-Plating System, PECVD, PVD, CVD, IBD, CMP, Pulsed Laser Deposition
Diffusion & Thermal Process
High Pressure Annealing Systems, RTP
Metrology & Inspection
Optical / Stylus Profiler, Standards, 3D X-Ray Microscopy, Isolation Systems, Stress Meter, CD / Overlay Metrology, Defect inspection, 2D/3D AOI
Back-end Process
Ball Mounter, Reflow, EMI Tape, SMT Scope, Paste & Sheet, 2D/3D AOI, Baking Oven, Plasma Clean & Descum ESD Solution, Solution for Silicon Photonic
Sub-Systems & Others
Laser Marker, Power Supply, RF Generator, Robot, EFEM, Pressure Sensor, Valves, Metal Cassette, Magazine, KVM, ESD Solution, Optical Filter, O2 Analyzer, Power Conditioner, Motor, Linear Rail System, Encoder
Flat Panel Display
Dry Etch, PECVD, Annealing Furnace, PI Curing Furnace, PVD, Mask / Cassette Cleaner, Optical / Stylus Profiler, AP Plasma Clean, PVD Sputter, Dry Etcher, PI curing
Panel Level Package
Dry Etcher, Plasma Cleaning / Descum , Dip Coater ,Laminator , Oven , PVD Sputter , PI curing, Pressure Sensors, X-ray inspection
Analytical Inst.
Particle Sizer, Pre-Treatment, Element Analyzer