iAS系列产品是星空科技自主研发的创新型整面曝光机,适用于先进封装、MEMS、功率器件和高端显示等方面。
应用领域:扇出大芯片曝光、封装基板大面积曝光和 Micro LED大面板曝光等。
iAS series products are full FOV scanner independently developed by iSTAR, for high-end display applications, IC substrate, and advanced packaging, and applications such as large FOV exposure of MicroLED, IC substrate and Fan-out.
| 设备型号 Model | iAS3000 | iAS5000 | iAS9000 |
| 最高分辨率 Max. Resolution | 1μm | 1μm | 1μm |
| 最大基片尺寸 Max. Substrate | ∅300mm | 515mm×510mm | 730mm×920mm |
| 应用对象 Applications | 扇出大芯片 Fan-out | 封装基板 IC Substrate | Micro LED 基板 Micro-LED |