AGC Inc.

Features

• Precise fine pitch small TGV and Cavity formation
• Available in wide variety of glass composition and thickness (0.2 ~ 1.0mm)
• High aspect ratio (up to 20:1) at 1.0mmt
• High modulus and CTE adjustability for Warpage Control
• Panel format production (e.g. 510x515mm)

Applications

• Glass core for Advanced Packaging (e.g. Chiplet packaging substrate)
• RF device (e.g. Integrated Passive Device, Antenna in Packaging)

・By using the ion-assisted deposition method, we have succeeded in producing a special yttrium film with excellent plasma resistance.

AGC's yttrium film has a different crystal orientation, high hardness, and high density than yttrium films made by thermal spraying, AD, or other PVD methods.

・It also has excellent plasma resistance in high-temperature environments; for example, its durability at 200°C is more than 60 times that of quartz.

It is also possible to give the yttrium film heat resistance that will not crack even in environments of 500°C to 800°C.

・Applications include top plates, electrostatic chucks, and observation windows of etching and deposition equipment. Coatings can be made on a variety of substrates, including quartz, alumina, and AlN, so please contact us if there are any parts you would like to evaluate.

Features

• Designed specifically for AGC ceria slurry

• Highly effective in removing ceria particles and cerium ions

• Low etching rate for Ox and SiN substrates

• Good compatibility with copper

Applications

• Cleaning solution for ceria slurries ― applicable to both positively and negatively charged slurries ―

Features

• Resistance for Heat and Chemical
• Properties of Mechanical, Anti-Stick and Electrical
• Light Transmittance
• Weatherability

Applications

• Release films for Semiconductor, LED lens, PCB ang CFRP
• Protective films for Solar Cell surface, Rubber Closure and others
• Structural Materials for Architecture, Sports Stadium and Greenhouse