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YASKAWA ELECTRIC TAIWAN CORPORATION

New Taipei, Taichung, Tainan,  Taiwan
https://www.yaskawa.com.tw/
  • Booth: P5522

Overview

Yaskawa Electric is one of the world's leading manufacturers in the field of motion control technology, industrial automation, and robotics. We are always committed to using innovation to optimize the productivity and efficiency of machines and industrial systems. Our products and solutions are used in a wide range of industries, including machine and tool manufacturing, automotive, packaging, woodworking, elevators, air conditioning systems, textiles, and semiconductors.

At this year's SEMICON, we will be showcasing the excellent performance of our new semiconductor robotic arm, which provides high accuracy and ultra-low vibration optimization for the first time. We hope you will come and visit us!

  Products

  • SEMISTAR-GEKKO MD124D clean room robot
    Our new robotic with special DD motor design that is suited for future semiconductor miniaturization and multi-layer applications has arrived!...

    • The new robotic that's suited for the needs of future semiconductor miniaturization and multi-layer applications has finally arrived! The core competence of the product is that It uses a DD motor design, which can minimize the effects of stress on wafers during automated handling, also meets the needs of various wafer handling applications requiring high speed and high precision.

    Product feature：
    Vibration acceleration：0.25G以下
    Repeatability：±0.02mm
    Absolute positioning accuracy：0.05m

  • Modified MD124D for panel wafer transport
    Yaskawa has integrated our latest robot model, MD124D, into the most advanced panel wafer semiconductor manufacturing process. Through targeted modifications and enhancements, the system now enables precise panel wafer transport and alignment functions....

    • Yaskawa's 2 loadport EFEM demo highlights our latest innovation—the modified MD124D robot designed specifically for panel wafer transport. In addition to showcasing the robot's key features—stability, precision, and low vibration—the demo also demonstrates integrated fork alignment functionality for panel wafers. Unique to Yaskawa's design, the MD124D supports up to four loadports, enabling efficient handling with a single robot. This not only streamlines operations but also significantly reduces system costs for our customers.
  • Σ-X Series Servo Motor

    Digital data solutions by the Σ-X series will transport you to the next step in production with the high precision collection and analysis of data....

    • [Data-Driven Digital Solutions Starting from Servo Systems]
    Data collection can begin immediately without modifying machine or equipment designs. By analyzing data such as vibration, external disturbances, and torque commands, trends can be predicted to effectively prevent unexpected downtime and failures.

    [Industry-Leading Motion Control Performance]
    By implementing the Σ-X series, equipment performance and production efficiency can be significantly improved. The intelligent servo system also helps shorten development lead time.

    [Functional Safety Compliance]
    By combining the advanced safety module (ASM-X) with the Σ-X servo system and using functional safety motors, safety levels of SIL3 and PLe (CAT3) can be achieved.

  • FT Specifications FT70
    (forGantryApplicationsBuilt-in Gantry Application Function & Torque/Force Assistance Function)
    TheFT70 SERVOPACKsupports functions optimized for gantry driving and torque/force assistance to provide an optimal solution for problems with gantry mechanisms....

    • This servo pack is equipped with optimal functions for gantry drive systems and supports torque/thrust assist features.
    It includes four built-in functions specifically designed to address issues unique to gantry mechanisms, helping to prevent mechanical damage and improve cycle times.
    Additionally, with torque/thrust assist functionality, it enables the coordination of multiple servo packs to realize high-thrust (torque) systems.

Categories

400 Components, Parts & Accessories
  • Chucks for Wafer and other Substrates
    • 401 Sub-systems
  • Motion control systems; Servo control systems & Components
    • 402 PV Systems
  • Inverters
    • 502 Material Handling Systems
  • Robotics; Transfer Systems
    • 701 Manufacturing Services or Consulting
  • Wafer Handling
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