HD Series
Hybrid Screw Rotor Design
→ Equipped with a hybrid screw that combines lobe and screw types, providing excellent powder handling capability. The short gas path further enhances powder processing performance.
Low Power Consumption
→ With the hybrid screw compression structure, the HD series consumes less power compared to the DD series.
XD Series
Hybrid Screw Rotor Design
→ Designed for light process applications.
→ Compact pump design ensures low power consumption.
→ Features LOT’s coating for enhanced corrosion resistance, ideal for semiconductor etch processes that involve corrosive gases.
Small Installation Footprint
→ Approximately 35% smaller footprint compared to competitors' models with similar specifications.