"SPADER™" is our pressure control product that integrates technology and solutions to meet your needs.
It provides vacuum environments and high-performance pressure control for semiconductors, displays, chambers, wafers, and clean rooms.
◎ Type
- STV A : Controller Integrated
- STV B : Controller Separated
* Option : High speed(0.1sec), Heating
◎ Adventages
◇ Superior Control
– Specially optimized control algorism
– Noise free (EMI suppression filter to input signal)
– Encoder-based precies & actual position control
◇ High Speed Control
– Speed : 0.5 sec (Open-Close)
◇ High Torque
– High torque(971 in-oz) direct gear drive motor
◇ Realtime Multi Sync
– Multi valve position synchronization
– Offset or ratio applicable
◇ Dual Gauge
– 1.4A ±15V DC power for two pressure sensors
◇ Interlock I/O
– Dry contact I/O (2 digit input, 2 digit output)
– Cable unplug detection function@STVB series
◇ Temp Monitoring
– Internal temperature detecting fuction
◇Communications
– RS485, DeviceNET, EtherCAT
◎ Specification
| item | unit | Specification |
| Opening diameter | mm | 100 |
| Input power required | – | 24VDC @<120W Max. |
| Valve operated | – | PID, Position, Auto tuning, Sync(Master/Slave) |
| Speed (Open to close) | sec | 0.1 |
| Resolution (Valve position) | – | 1/5,000 |
| Output torque | In-oz | 347 |
| Control repeatability | % | ±0.1 of F.S |
| Pressure gauge power output | – | ±15VDC @ <1.4A max. |
| Communications | – | RS485, DeviceNet, EtherCAT |
| Operating Temperature (Valve body) | ℃ | ≤150 |
| Operating Temperature (Ambient) | ℃ | ≤50 |
| Differential pressure | psig | 15 |
| External leakage at shaft seal | scc/sec He | 1.0E-08 |
| Flapper type | – | Non-sealing |
| Flapper gap | mm | 0.05 |
| Drive method | – | Direct gear drive |
| Encoder based actual position control | – | Provision |
| Cable unplug detection | – | Provision |
| Butterfly to shaft separated | – | Provision |
| Exposed material (Body) | – | Provision |
| Exposed material (Shaft,Plate,Crews) | – | Provision |
| Exposed material (Shaft seal) | – | Provision |