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Pfeiffer Vacuum Taiwan Corporation

Hsin-Feng,,  Hsinchu County 
Taiwan
http://www.pfeiffer-vacuum.com
  • Booth: K2870

Complete fab solutions. From cleanroom to exhaust!

Overview

Pfeiffer Vacuum+Fab Solutions supplies turbomolecular vacuum pumps, dry vacuum pumps, and measurement equipment for  applications including PVD, CVD, lithography, etch and implant processes as well as back-end applications. For inspection and metrology, we provide low-vibration vacuum solutions. Additionally, we offer leak detectors and systems for contamination management. Pfeiffer also manufactures flanges, valves, fittings and chambers as well as custom components.

Pfeiffer is part of the Busch Group, one of the world’s largest manufacturers of vacuum pumps, vacuum systems, blowers, compressors and gas abatement systems. Under its umbrella, the group houses two well-known brands: Busch Vacuum Solutions and Pfeiffer Vacuum+Fab Solutions.

  Products

  • THERMAL OXIDIZER HYBRID (CT-TW-H)
    Electrically heated waste gas treatment system with integrated wet scrubber...

    • Selectively increased the combustion temperature via hydrogen injection to destroy PFC gases
      Flexible design in accordance with customer requirements
    • High up-time and easy to maintain
    • Low TCOO with fewer wear parts
    • Superior German manufacture quality
  • UltiDry
    Multi-stage Roots pump...

    • The UltiDry pumps are the latest innovation in sustainable technology, offering a range of advantages that will leave you amazed. 

    Designed to withstand the most challenging processes

    Engineered to enhance powder management, handle high inlet flows, withstand corrosive gases, prevent chemical reactions, and avoid condensation of byproducts, UltiDry ensures optimal performance and extends pump lifetime.

  • ASM 390/392
    Mobile leak detectors optimized for rapid pump down and short response times on large test objects...

    • Superior performance, fast testing
    • Robust, accurate and reliable
    • Ergonomic and highly maneuverable
    • Smart and user-friendly

Categories

202 Equipment, General Use
  • Space simulation; Vacuum chambers
  • Vacuum drying & out gassing Systems
    • 203 Equipment, Inspection & Measurement
  • Leak Detection Systems - Vacuum or Gas
    • 400 Components, Parts & Accessories
  • Vacuum Systems Components & Accessories (optical monitors; Sputtering target fixtures; lubricants; p
    • 401 Sub-systems
  • Pumps, Vacuum
    • 402 PV Systems
  • Measurement and Control Technology
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