RENA Technologies GmbH

Gütenbach, Germany
http://www.rena.com

Booth: M1055

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Welcome to RENA Technologies GmbH!

Overview

About RENA Technologies GmbH

RENA - The art of wet processing.

RENA Technologies is the worldwide technological leader for wet chemical equipment.

We provide the most valuable, innovative wet-chemical solutions for our clients to reach the next level of state-of-the-art.
We manufacture highest quality flexible and high-throughput equipment for producing semiconductor products for all manner of different sectors.
RENA equipment is used to treat the surfaces of semiconductor wafers, like etching, plating, cleaning and drying with standardized machines and guaranteed processes or entirely customized equipment.

We have 3 manfacturing sites, 2 innovation hubs and more than 1.150 machines installed worldwide. We are constantly developing the most efficient process for our clients to achieve perfect surface quality. With more than 100 engineers, 150 global service experts at 20 service locations we work to make RENA machines a long-term success story.

For more information, visit https://www.rena.com.

Products

Revolution+

Semi-automated wet bench for multi-step processes... More Info Less Info

Features and Benefits

Dry-to-Dry Capabilities
up to 200 mm wafer
Multi-Step Sequences with parallel processing
SECS/GEM compatible
Low footprint
Up to 125 wph
Optional FFUs
EFEM Versions available
Stainless-steel version for Solvent application

Find out more
https://www.rena.com/en/products/semiconductor/batch-immersion/revolution-plus

Convergence

Fully automated Processing Platform... More Info Less Info

Features and benefits

Dedicated versions for 200 and 300 mm
Precision - perfect process monitoring for tight process control
Fully customizable to any customer specification or wish
Full compliance with the SEMI standard
Carrierless or LMC processing
High throughput
Up to GEM300 compatible
Stainless-steel version for Solvent application

Find out more
https://www.rena.com/en/products/semiconductor/batch-immersion/convergence

BatchGlass LF HTX | Lab Tool

Semi-automated Platform

Through Glass Via (TGV) Processing Equipment... More Info Less Info

Advanced Alkaline Processing Platform for Glass Panels

Features and benefits

Processing of large format panels up to 600 x 600 mm²
Optimized tank design and flow for excellent homogeneity of etching
Optimized footprint and modular design
24/7 operation and easy upscaling of process
Highest surface cleanliness and with optimized pre and postcleaning
Full MES and automation compatibility

Find out more
https://www.rena.com/en/products/glass-sapphire/through-glass-vias-tgv

BatchGlass P3 | Production Tool

Fully automated Platform

Through Glass Via (TGV) and Cavity Processing Equipment... More Info Less Info

Advanced Alkaline Processing Platform for Glass Panel

Features and benefits

Processing of large format panels such as 310 x 310 mm² or 510 x 515 mm²
Cavity ready
Optimized tank design and flow for excellent homogeneity of etching
Optimized footprint, modular design, and high cleanroom capabilities
24/7 operation and easy upscaling of process
Highest surface cleanliness and with optimized pre and postcleaning
FOUP-to-FOUP Processing
GEM300 MES standard
SEMI standard compliant
Pilot Line and HVM suited

Find out more
https://www.rena.com/en/products/glass-sapphire/through-glass-vias-tgv

Categories

200 Equipment, Assembly

Cleaning; Washing Equipment for Assembly & Packaging

207 Equipment, Process

Cleaning; Washing; Drying Equipment for Substrate, Fab Processing

Etching; Stripping; Ashing - Dry and Wet Equipment

Plating; Electro Chemical Plating; Deposition Systems

700 Manufacturing Services

Repair; Rebuild; Install Equipment; Maintenance Services; Spare Parts

701 Manufacturing Services or Consulting

Automation & Robotics

Equipment; Hardware; Product Design, Integration and Manufacturing

Manufacturing Process Support and Development