Special requirements are placed on ceramic components used in systems for the production of semiconductors and optoelectronic components. In addition to the necessarily excellent mechanical properties such as strength and toughness, corrosion resistance and precise machinability also play an important role. Materials that are often used are, for example, aluminum oxide (Al2O3), zirconium oxide (ZrO2), quartz (SiO2), silicon nitride (Si3N4) and silicon carbide (SiC).