Dummy Wafer is blank polished silicon wafer matching the size and thermal expansion of production wafers. Widely used for chamber conditioning, equipment calibration and production wafer protection in etching, deposition & oxidation processes. Available in 6/8/12 inch with ultra-low TTV/BOW warpage ≤25μm. Custom surface treatment and packaging supported for fabs, labs and semiconductor equipment manufacturers. 中文:工艺挡片是经过抛光的空白硅晶圆,尺寸与热膨胀系数均和量产晶圆完全匹配,广泛应用于刻蚀、薄膜沉积、氧化工艺流程中,用于腔体环境预处理、设备校准以及保护量产晶圆。产品覆盖 6/8/12 英寸规格,总厚度偏差、弯曲度、翘曲度均控制在 25 微米以内,可定制表面处理工艺与包装方案,适用于晶圆工厂、实验室及半导体设备厂商。