MTI Instruments Proforma™ non-contact wafer metrology systems help manufacturers optimize thin-film
processes, improve process control, and increase production yield.
The growing importance of wafer stress measurement in semiconductor manufacturing as advanced
packaging, heterogeneous integration, silicon carbide (SiC), gallium nitride (GaN), MEMS, and photonics
applications continue to drive demand for tighter process control, improved manufacturing consistency,
and higher device reliability.
As semiconductor manufacturing processes become increasingly complex, engineers are placing greater
emphasis on monitoring wafer stress to optimize thin-film deposition, validate process changes, detect
equipment drift, and improve production yield. Full-wafer stress characterization provides valuable insight
into process stability, enabling manufacturers to identify subtle variations before they impact downstream
operations.
Vitrek’s Proforma™ family of non-contact wafer metrology systems, exclusively distributed by VASTi
Technologies, provides high-precision measurement of wafer stress, bow, warp, curvature, thickness, and
total thickness variation (TTV). By capturing comprehensive full-wafer measurement data, Proforma
systems help engineers visualize stress distribution, evaluate process changes, and support statistical
process control (SPC) initiatives throughout semiconductor manufacturing.
“Wafer stress has become much more than a laboratory measurement—it is now an important indicator of
manufacturing performance,” said Ken Ameika, VP Global Sales at Vitrek. “Understanding how stress
changes throughout fabrication enables engineers to optimize processes, improve repeatability, and
support higher manufacturing yields.”
VASTi Technologies is a professional distributor of high-end instrumentation, serving as Vitrek LLC's agent
in Asia, covering Taiwan, Japan, the Philippines, Vietnam, Thailand, and other regions, offering professional
instrumentation sales and services.
We cordially invite you to visit our booth at SEMICON Taiwan 2026.
Booth : R8119
Location : 4th Floor, TaiNEX 2, Taipei, Taiwan
September 2-4, 2026
Contact Us:
Phone: +886-2-29588760
Email: [email protected]
Web: www.vastitec.com