Maximum Efficiency for Your Wastewater Treatment

Benefit from:

• Adaptable to different volume flows and particle sizes
• Compact plug-and-play unit
• High system efficiency enables direct water reuse
• Guaranteed process reliability
• Integrated control and measurement technology
• Reduced fresh water consumption and waste water volume
• Contribution to sustainable water management in semiconductor production

Best-in-Class Abatement System: TILIA Exceeds SEMI SCC Greenhouse Gas Benchmarks

DAS Environmental Expert GmbH reaffirms its leadership in sustainable semiconductor emissions control with independent validation showing that its TILIA abatement system achieves Destruction and Removal Efficiencies (DRE) exceeding 99.9% for CF₄ and other fluorinated greenhouse gases. This performance surpasses the targets defined in the 2024 SEMI SCC Whitepaper “Overview of F‑GHG and Nitrous Oxide Semiconductor Abatement Technologies,” which sets new industry benchmarks at a minimum DRE of >95% and an aspirational goal of >99%. TILIA proves that even higher efficiencies are not only technically feasible but deliver tangible sustainability and economic advantages.

Point-of-Use Waste Gas Treatment with the Electrostatic Filter EDC

With our electrostatic micro and nanoparticle separator EDC (Electrostatic Dust Collector), particle- or aerosol-contaminated process waste gases can be treated directly at the point of use. The dust collector reduces particle emissions of even the finest particles up to 99.9 % and successfully prevents exhaust blockage. It can be used downstream of most particle generating systems. Access for operating and maintenance is possible from the front and back.

DALEA - Reducing Micro- and Nanoparticle Emissions

The integrated rotating fine dust collector reduces emissions of fine dust particles by up to 98%. DALEA has proven itself especially effective in separating tungsten dust from WF6 processes. With a high capacity of up to 390 m³/h and its compact design, the DALEA is ideal for new and existing fabs. The DALEA can be connected behind most dust-emitting equipment. In addition, the rotor works as a fan and moves the waste gas forward. This prevents any loss of pressure and even supports the exhaust system. Access for operation and maintenance is from the front and back.

RDC – can be integrated into or added to classic burn-wet systems

The RDC range was developed by DAS Environmental Experts in response to a client’s request. The systems are small, which means they can be integrated into or added to the classic burner-scrubber systems. RDC systems can also be used for much higher dust loads than the EDC systems, as well as for higher waste air flows. In addition, the rotor works as a blower and moves the waste gas forward; this prevents any loss of pressure and even supports the extraction that normally follows.

Advanced NOx Treatment

Based on the proven DAS plasma-enhanced catalytic technology, ALCEA is a highly integrated and highly efficient secondary abatement system for use downstream of any NOx-generating waste gas treatment units. The process uses plasma technology to generate Reactive Oxygen Species (ROS), which then serve as the basis for the catalytic reactions. 

Dependent on prior treatment steps ALCEA achieves exceptional NOx reduction efficiency of up to 95% with minimal energy consumption. Through the integration of the catalyst unit in the exhaust ducts ALCEA has virtually no footprint. The technical system can be easily fitted into the subfab’s exhaust duct system.