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Zhejiang Futong Quartz New Material Co.,Ltd

,Huzhou City,  City,Zhejiang Province 
China
http://www.futongquartz.com
  • Booth: X0026

Welcome to visit FUTONG QUARTZ at booth# X0026

Overview

  Futong Quartz was established in 2010. After years of development, its headquarters is now located in the central hinterland of the Yangtze River Delta economic cluster - Nanxun District, Huzhou City, Zhejiang Province. It has a self-built factory of 28,000 square meters and is equipped with all kinds of professional quartz processing equipment. It is an industry-leading professional quartz manufacturing enterprise, providing global customers with high-quality and high-performance quartz products and solutions.
  Our company mainly manufactures quartz devices required by the diffusion process, CVD process, etching process and cleaning process in the front process of wafer farbrication , including: Quartz Boats, Quartz Furnace Tube, Quartz Door, Exhaust Pipe, Quartz Tank, Quartz Ring and other customized quartz  products under different process equipment application scenarios of semiconductor. Our company has passed ISO9000、ISO140001、ISO45001 certification, and products are in complete specifications and reliable quality. 
  In the future, Futong Quartz will continue to explore new technologies, processes, and fields while expanding into diversified markets. It will also enhance its independent innovation capabilities and accelerate iteration processes. Moreover, it will actively support green manufacturing initiatives and promote the sustainable development of the industry. This will enable it to provide global customers with high-quality, efficient, and eco-friendly quartz products.

  Press Releases

  • 2010: Suzhou Futong Quartz Technology Co., Ltd. was founded.
    2013: Successfully developed quartz boats, automatic loading & unloading carriers for silicon wafers in the photovoltaic industry.
    2015: Mastered the manufacturing technology for long quartz boats with square and rhombus wafer slots.
    2016–2017: Launched mass production of quartz products for TOPCON processes.
    2021: Implemented corporate strategic relocation and established the Zhejiang manufacturing base.
    2023: The Zhejiang base officially commenced production.
    2025: Increased investment in R&D of manufacturing technologies for semiconductor quartz products.
    2026: The Class 1000 cleanroom for semiconductor production was fully put into operation.
  • (Jun 25, 2026)
    FUTONG QUARTZ has obtained a number of authoritative qualifications, including certifications for the three major management systems: ISO9001, ISO14001 and ISO45001. We have also been awarded honors such as National High-tech Enterprise, Provincial Specialized, Refined, Differential and Innovative Enterprise, and Innovative Small and Medium-sized Enterprise. 
    Our capabilities in technological innovation and product quality keep improving stead

  Products

  • QUARTZ TUBE
    Semiconductor quartz tubes are core tubular components for high-temperature processes including diffusion, oxidation, annealing and vapor deposition in semiconductor manufacturing....

    • Material Performance
    Constructed from semiconductor-grade high-purity quartz, the product has an extremely low content of metallic impurities with no ion leaching under high-temperature conditions. It features an ultra-low coefficient of thermal expansion, capable of enduring sustained temperatures above 1200°C, alongside excellent thermal shock resistance to resist cracking during alternating hot and cold cycles. With stable chemical properties, it resists corrosion from acids, alkalis, etching gases and various process chemicals.
    Process & Specifications
    The tube is formed by integral drawing or precision welding, featuring uniform wall thickness, burr-free smooth inner walls and outstanding air tightness. Customization is available for outer diameter, wall thickness and length, together with machined structures such as flanges, bevels and branch pipes to fit horizontal and vertical high-temperature furnace equipment. Fine surface polishing effectively prevents particle shedding.
    Production Standards
    Machining, cleaning and packaging are completed in a Class 1000 cleanroom in strict accordance with semiconductor cleanliness standards, fully meeting the requirements of advanced manufacturing processes.
    Application Scope
    It is mainly used as furnace tubes, gas delivery pipelines and reaction chamber sleeves for semiconductor high-temperature furnaces, matching core processes including diffusion, oxidation, LPCVD and annealing. It also serves the production of photovoltaics and special electronic components.
  • QUARTZ ETCHING CLEANING TANK
    Quartz etching cleaning tanks are dedicated core vessels for wafer etching and cleaning processes. They resist strong acids, alkalis and corrosive etching chemicals, boasting high temperature resistance, low ion leaching and outstanding cleanliness.
    ...

    • Material Performance
    Fabricated from semiconductor-grade high-purity quartz, it contains extremely low metallic impurities with zero ion leaching under high-temperature and heavy corrosive environments. It delivers exceptional chemical stability to withstand hydrofluoric acid, acid & alkaline solutions and various etching reagents. Excellent thermal stability enables adaptation to multi-temperature-controlled cleaning working conditions.
    Process & Structure
    The integral surface features superior smoothness to prevent particle generation. Customizable tank dimensions, card slots and flow guide structures are available to match wafers of various specifications and automated production lines.
    Production Standards
    Machined, cleaned and packaged in a Class 1000 cleanroom in full compliance with semiconductor cleanliness specifications, meeting stringent high-purity requirements for advanced manufacturing processes.
    Application Scope
    It is mainly adopted in post-etch wafer cleaning, post-photolithography cleaning, acid-alkali soaking, ultrasonic cleaning and other processes, widely utilized in chip fabrication, discrete devices, photovoltaic semiconductors and related industries.
  • INNER BATH OF VERTICAL QUARTZ BOAT
    The inner base for vertical quartz boats is a special supporting accessory matched with semiconductor vertical quartz boats. It delivers stable bearing performance, excellent resistance to high and low temperature cycling,....

    • Material Performance
    Made of semiconductor-grade high-purity quartz, it contains low metallic impurities with zero ion leaching under high-temperature working conditions. It has a low thermal expansion coefficient, withstands continuous temperatures over 1200°C, and boasts superior thermal shock resistance to avoid cracking during thermal cycling. Resistant to acids, alkalis and process gas corrosion, it adapts perfectly to all kinds of semiconductor high-temperature process environments.
    Process & Structure
    Precisely matched with vertical quartz boats. The contact surface undergoes precision polishing with high flatness to prevent wafer scratching and displacement. It features high dimensional accuracy for tight clamping fit and easy assembly & disassembly. Custom sizes and shapes are available to conform to boat body specifications.
    Production Standards
    Machining, cleaning, inspection and packaging are all finished in a Class 1000 cleanroom in strict compliance with semiconductor cleanliness criteria. Free of residual particles, it fully meets the demands of high-end wafer production lines.
    Application Scope
    Specially designed as a matching component for semiconductor vertical quartz boats. It applies to high-temperature processes such as wafer diffusion, oxidation, annealing and LPCVD, and is widely used in chip manufacturing, advanced packaging, MEMS and other industries.
  • QUARTZ BOAT
    Quartz boats for semiconductors serve as core carrier fixtures for high-temperature processes such as wafer diffusion, oxidation, annealing and LPCVD. Compatible with wafers of all sizes....

    • Material Performance
    Made of semiconductor-grade high-purity quartz with extremely low metallic impurity content, it generates no ion leaching during long-term service. Boasting a low coefficient of thermal expansion, it enables continuous operation at 1200°C, features outstanding resistance to acids, alkalis and process gas corrosion, and possesses superior insulating properties.
    Process Specifications
    Manufactured via precision machining, it features evenly spaced slots and precise positioning. Finely finished surfaces deliver high smoothness, abrasion and scratch resistance, effectively inhibiting particle generation.
    Production Standards
    Fabricated in a Class 1000 cleanroom in strict accordance with semiconductor cleanliness standards, fully compliant with requirements for high-end wafer production lines.
    Application Scope
    Primarily applied in high-temperature processes for semiconductor wafers, including diffusion, oxidation, annealing and LPCVD, compatible with mainstream-sized silicon wafers.

Categories

307 Materials, Process
  • Quartz ware (Silicon Carbide, Fused Quartz Glass, Sapphire), Ceramic & Oxide Ceramic Fixtures

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