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GfG - Gesellschaft für Gerätebau mbH

Zhubei City,  Hsinchu County 
Taiwan
https://www.gfgsafety.com/int/
  • Booth: T9021

GfG – Gas Detection Solutions for the Semiconductor Industry

Overview

Gas detection for the semiconductor industry

Semiconductor manufacturing relies on numerous toxic, corrosive and combustible gases – making reliable gas detection an essential part of protecting people, processes and facilities.

GfG develops and manufactures gas detection solutions for applications throughout semiconductor production. Our portfolio ranges from highly sensitive D-ReX gas detection systems for monitoring process tools, gas cabinets and scrubbers to fixed gas detection systems, portable gas detectors and replacement sensors.

With 65 years of experience in gas detection, GfG combines application expertise with flexible solutions tailored to individual monitoring requirements. Our gas detection technology is developed and manufactured at our headquarters in Dortmund, Germany, and supported by GfG subsidiaries and partners worldwide.

  Press Releases

  • New addition to the D-ReX family combines highly sensitive gas detection with simplified service, compact installation and a design focused on lower total cost of ownership.

    Dortmund, Germany – August 2026. GfG has expanded its D-ReX family for semiconductor gas monitoring with the new D-ReX PoS². The new model builds on the capabilities of the established D-ReX PoS while introducing a new design focused on simplified service, space-saving installation and a lower total cost of ownership.

    Semiconductor manufacturing relies on a wide range of toxic, corrosive, flammable and highly reactive gases. At the same time, monitoring requirements can differ considerably depending on where a measurement is taken. Gas detection close to a process tool presents different challenges from monitoring exhaust lines or gases associated with scrubbers and other abatement systems.

    This is why GfG approaches semiconductor gas detection as an application-specific task rather than relying on a single monitoring concept. The D-ReX family provides different configurations for monitoring hazardous gases at critical points throughout semiconductor manufacturing – from process-related applications to exhaust and abatement monitoring.

    Designed for easier service and lower total cost of ownership

    The D-ReX PoS² adds a new service concept to the established capabilities of the D-ReX PoS. Its design enables fast, tool-free removal and replacement of the device, helping to reduce service time and associated downtime.

    During device replacement, the connection terminal, electrical wiring and tubing remain installed on the wall. This significantly simplifies replacement procedures and reduces the work required during servicing.

    Combined with its compact, space-saving design, these features are intended to reduce maintenance effort and contribute to a lower total cost of ownership over the lifetime of the gas detection system.

    Different processes require different detection concepts

    The PoS² is the latest addition to a broader range of D-ReX solutions developed for the different monitoring requirements found within semiconductor facilities. Depending on the application, the appropriate measurement concept is determined by factors including the target gas, expected concentration, process conditions and location of the measurement point.

    Some semiconductor gases also require an additional step before they can be reliably detected. For these applications, GfG uses pyrolysis technology. The target gas is heated to a defined temperature and decomposed into measurable reaction products. These products are detected by the sensor, allowing the D-ReX to determine the concentration of the original target gas. For example, NF₃ can be thermally decomposed and detected via the resulting HF concentration.

    Together, these different approaches enable gas monitoring concepts to be tailored to specific areas and processes within a fab rather than applying the same detection method to every measurement point.

    From specialized detection to complete gas warning systems

    Gas detection within a semiconductor facility extends beyond specialized process gases. A comprehensive safety concept can include monitoring for additional toxic and combustible gases as well as the evaluation and processing of signals from numerous measurement points.

    GfG therefore combines its specialized D-ReX solutions with a broader portfolio of fixed gas detection technology, including gas detection controllers such as the GMA400 and transmitters for combustible gases such as the CC28. Replacement sensors for existing gas detection systems further complement the portfolio.

    With 65 years of experience in gas detection, GfG develops and manufactures gas detection technology at its headquarters in Dortmund, Germany. The company's semiconductor solutions combine sensor technology, application-specific measurement concepts and system integration to address gas monitoring requirements across different areas of semiconductor manufacturing.

  Products

  • D-ReX PoS²
    Advanced point-of-sampling gas detector for semiconductor applications, combining highly sensitive gas monitoring with tool-free maintenance, a compact design and features that help reduce downtime and total cost of ownership....

    • The D-ReX PoS² is designed for demanding point-of-sampling applications in semiconductor manufacturing. An integrated pump extracts the sample gas over distances of up to 30 meters, while smart sensors enable the detection of more than 60 gases. Optional Line Integrity Monitoring continuously monitors the sampling line for leaks or blockages.

    A key focus is efficient servicing: the sensor cartridge and pump are easily accessible and can be replaced without tools. During device replacement, the connection terminal, wiring and tubing remain installed. Combined with its compact design, this helps reduce maintenance effort, service-related downtime and total cost of ownership.

    Integration options include 4–20 mA, RS-485/Modbus RTU and Ethernet/Modbus TCP, plus Power over Ethernet and an integrated web server.

  • D-ReX
    Flexible gas detection platform for semiconductor manufacturing with PoU, PoS and PoI configurations for diffusion, extractive and remote gas monitoring at different measurement points throughout the fab....

    • The D-ReX family provides application-specific gas detection for demanding semiconductor environments. Three configurations allow the measurement concept to be adapted to the monitoring point:

    PoU – Point of Use: diffusion monitoring directly at the installation location.

    PoS – Point of Sampling: extractive monitoring using an integrated pump, with sampling distances of up to 30 meters and optional Line Integrity Monitoring.

    PoI – Point of Installation: remote diffusion monitoring using an external sensor cartridge, which can be installed up to 1,200 meters from the D-ReX.

    All variants combine smart sensor technology with flexible system integration. Interfaces include 4–20 mA, Modbus TCP/RTU and LonWorks, complemented by five freely programmable relays.

  • Py-ReX
    Filament pyrolyzer extending D-ReX gas detection to selected gases that cannot be measured directly. Target gases are thermally decomposed into reaction products that can be detected by an electrochemical sensor....

    • The Py-ReX extends D-ReX monitoring capabilities to selected process gases such as NF₃, CH₃F or DCE.

    The target gas passes through a quartz glass tube containing a filament heated to a gas-specific temperature. It decomposes into measurable reaction products, which are subsequently detected by an electrochemical smart sensor. The concentration of the original target gas is calculated from the measured decomposition product.

    The Py-ReX is installed as a separate unit ahead of the D-ReX PoS or PoS². Separating the high-temperature pyrolysis process from the electrochemical sensor protects the sensor from thermal stress while providing a flexible solution for demanding semiconductor applications.

  • GMA400 Gas Detection Controller
    Powerful controller for large gas detection systems, providing centralized monitoring of up to 128 D-ReX units or other transmitters and flexible integration into complex semiconductor facilities....

    • The GMA400 provides centralized control and evaluation for complex fixed gas detection systems. A single controller can monitor up to 128 digital transmitters or measurement channels, making it particularly suitable for semiconductor facilities with numerous monitoring points.

    The system can combine D-ReX units with other GfG transmitters and provides a central overview of measured values, alarms and system status. Modular expansion options support the integration of additional transmitters, relays and alarm devices.

    For enhanced visualization, the GMA400 can be combined with TFT touch panel PCs running GMA Visual, providing a structured overview of measurement points and supporting targeted responses to alarms and system faults.

  • CC28 Gas Detector
    Fixed gas detector for fast and reliable monitoring of combustible gases and vapors, including applications around exhaust and abatement systems in semiconductor manufacturing....

    • The CC28 is designed for continuous monitoring of combustible gases and vapors and complements specialized process gas detection within semiconductor fabs. Typical applications include areas around exhaust and abatement systems where combustible gases may present an additional hazard.

    Its catalytic combustion sensor technology provides reliable detection of potentially explosive gas concentrations. An integrated exhaust design allows heated air generated by the measuring principle to escape upwards, creating a chimney effect that helps the measuring gas reach the sensor quickly.

    The CC28 can be integrated with GfG gas detection controllers such as the GMA400, allowing combustible gas monitoring to become part of a comprehensive gas detection concept throughout the fab.

  • Satellix – Replacement Sensors for Satellite XT
    Plug-and-play replacement sensors for Satellite XT transmitters, providing precise detection of over 30 toxic, corrosive and combustible gases used in semiconductor processes....

    • Satellix by Sensorix is a range of plug-and-play replacement sensors developed for existing Satellite XT transmitters. The portfolio provides precise detection of over 30 gases used in semiconductor processes, including hydrides such as AsH₃, PH₃ and SiH₄ as well as HF, HCl, HBr, Cl₂, NH₃, H₂ and many other target gases.

    Satellix sensors are available as electrochemical sensors and pellistors for LEL monitoring. Dedicated sockets and programmed EPROMs provide compatibility with Satellite XT transmitters, allowing operators to continue using their installed infrastructure with a plug-and-play sensor solution.

    For facilities considering a complete system modernization, GfG can additionally provide migration concepts based on D-ReX and Py-ReX technology.

Categories

203 Equipment, Inspection & Measurement
  • Leak Detection Systems - Vacuum or Gas
    • 400 Components, Parts & Accessories
  • Sensors
    • 401 Sub-systems
  • Process Monitoring systems
    • 500 Factory Monitoring & Control Systems (FMCS)
  • Gas Monitoring Equipment; RGA's; TGO compliance
    • 900 Support Products
  • Safety

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