GfG - Gesellschaft für Gerätebau mbH

The D-ReX PoS² is designed for demanding point-of-sampling applications in semiconductor manufacturing. An integrated pump extracts the sample gas over distances of up to 30 meters, while smart sensors enable the detection of more than 60 gases. Optional Line Integrity Monitoring continuously monitors the sampling line for leaks or blockages.

A key focus is efficient servicing: the sensor cartridge and pump are easily accessible and can be replaced without tools. During device replacement, the connection terminal, wiring and tubing remain installed. Combined with its compact design, this helps reduce maintenance effort, service-related downtime and total cost of ownership.

Integration options include 4–20 mA, RS-485/Modbus RTU and Ethernet/Modbus TCP, plus Power over Ethernet and an integrated web server.

The D-ReX family provides application-specific gas detection for demanding semiconductor environments. Three configurations allow the measurement concept to be adapted to the monitoring point:

PoU – Point of Use: diffusion monitoring directly at the installation location.

PoS – Point of Sampling: extractive monitoring using an integrated pump, with sampling distances of up to 30 meters and optional Line Integrity Monitoring.

PoI – Point of Installation: remote diffusion monitoring using an external sensor cartridge, which can be installed up to 1,200 meters from the D-ReX.

All variants combine smart sensor technology with flexible system integration. Interfaces include 4–20 mA, Modbus TCP/RTU and LonWorks, complemented by five freely programmable relays.

The Py-ReX extends D-ReX monitoring capabilities to selected process gases such as NF₃, CH₃F or DCE.

The target gas passes through a quartz glass tube containing a filament heated to a gas-specific temperature. It decomposes into measurable reaction products, which are subsequently detected by an electrochemical smart sensor. The concentration of the original target gas is calculated from the measured decomposition product.

The Py-ReX is installed as a separate unit ahead of the D-ReX PoS or PoS². Separating the high-temperature pyrolysis process from the electrochemical sensor protects the sensor from thermal stress while providing a flexible solution for demanding semiconductor applications.

The GMA400 provides centralized control and evaluation for complex fixed gas detection systems. A single controller can monitor up to 128 digital transmitters or measurement channels, making it particularly suitable for semiconductor facilities with numerous monitoring points.

The system can combine D-ReX units with other GfG transmitters and provides a central overview of measured values, alarms and system status. Modular expansion options support the integration of additional transmitters, relays and alarm devices.

For enhanced visualization, the GMA400 can be combined with TFT touch panel PCs running GMA Visual, providing a structured overview of measurement points and supporting targeted responses to alarms and system faults.

The CC28 is designed for continuous monitoring of combustible gases and vapors and complements specialized process gas detection within semiconductor fabs. Typical applications include areas around exhaust and abatement systems where combustible gases may present an additional hazard.

Its catalytic combustion sensor technology provides reliable detection of potentially explosive gas concentrations. An integrated exhaust design allows heated air generated by the measuring principle to escape upwards, creating a chimney effect that helps the measuring gas reach the sensor quickly.

The CC28 can be integrated with GfG gas detection controllers such as the GMA400, allowing combustible gas monitoring to become part of a comprehensive gas detection concept throughout the fab.

Satellix by Sensorix is a range of plug-and-play replacement sensors developed for existing Satellite XT transmitters. The portfolio provides precise detection of over 30 gases used in semiconductor processes, including hydrides such as AsH₃, PH₃ and SiH₄ as well as HF, HCl, HBr, Cl₂, NH₃, H₂ and many other target gases.

Satellix sensors are available as electrochemical sensors and pellistors for LEL monitoring. Dedicated sockets and programmed EPROMs provide compatibility with Satellite XT transmitters, allowing operators to continue using their installed infrastructure with a plug-and-play sensor solution.

For facilities considering a complete system modernization, GfG can additionally provide migration concepts based on D-ReX and Py-ReX technology.