SEMICON Taiwan 2026

GfG - Gesellschaft für Gerätebau mbH

New addition to the D-ReX family combines highly sensitive gas detection with simplified service, compact installation and a design focused on lower total cost of ownership.

Dortmund, Germany – August 2026. GfG has expanded its D-ReX family for semiconductor gas monitoring with the new D-ReX PoS². The new model builds on the capabilities of the established D-ReX PoS while introducing a new design focused on simplified service, space-saving installation and a lower total cost of ownership.

Semiconductor manufacturing relies on a wide range of toxic, corrosive, flammable and highly reactive gases. At the same time, monitoring requirements can differ considerably depending on where a measurement is taken. Gas detection close to a process tool presents different challenges from monitoring exhaust lines or gases associated with scrubbers and other abatement systems.

This is why GfG approaches semiconductor gas detection as an application-specific task rather than relying on a single monitoring concept. The D-ReX family provides different configurations for monitoring hazardous gases at critical points throughout semiconductor manufacturing – from process-related applications to exhaust and abatement monitoring.

Designed for easier service and lower total cost of ownership

The D-ReX PoS² adds a new service concept to the established capabilities of the D-ReX PoS. Its design enables fast, tool-free removal and replacement of the device, helping to reduce service time and associated downtime.

During device replacement, the connection terminal, electrical wiring and tubing remain installed on the wall. This significantly simplifies replacement procedures and reduces the work required during servicing.

Combined with its compact, space-saving design, these features are intended to reduce maintenance effort and contribute to a lower total cost of ownership over the lifetime of the gas detection system.

Different processes require different detection concepts

The PoS² is the latest addition to a broader range of D-ReX solutions developed for the different monitoring requirements found within semiconductor facilities. Depending on the application, the appropriate measurement concept is determined by factors including the target gas, expected concentration, process conditions and location of the measurement point.

Some semiconductor gases also require an additional step before they can be reliably detected. For these applications, GfG uses pyrolysis technology. The target gas is heated to a defined temperature and decomposed into measurable reaction products. These products are detected by the sensor, allowing the D-ReX to determine the concentration of the original target gas. For example, NF₃ can be thermally decomposed and detected via the resulting HF concentration.

Together, these different approaches enable gas monitoring concepts to be tailored to specific areas and processes within a fab rather than applying the same detection method to every measurement point.

From specialized detection to complete gas warning systems

Gas detection within a semiconductor facility extends beyond specialized process gases. A comprehensive safety concept can include monitoring for additional toxic and combustible gases as well as the evaluation and processing of signals from numerous measurement points.

GfG therefore combines its specialized D-ReX solutions with a broader portfolio of fixed gas detection technology, including gas detection controllers such as the GMA400 and transmitters for combustible gases such as the CC28. Replacement sensors for existing gas detection systems further complement the portfolio.

With 65 years of experience in gas detection, GfG develops and manufactures gas detection technology at its headquarters in Dortmund, Germany. The company's semiconductor solutions combine sensor technology, application-specific measurement concepts and system integration to address gas monitoring requirements across different areas of semiconductor manufacturing.