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RENA Technologies GmbH

Gütenbach,  Germany
http://www.rena.com
  • Booth: N1067

Welcome to RENA Technologies GmbH!

Overview

About RENA Technologies GmbH

RENA - The art of wet processing.

RENA Technologies is a worldwide technological leader for wet chemical processing equipment. 

We provide the most valuable, innovative wet-chemical solutions for our clients to reach the next level of state-of-the-art.
We manufacture highest quality flexible and high-throughput equipment for producing semiconductor products for all manner of different sectors.
RENA equipment is used to treat the surfaces of semiconductor wafers, like etching, plating, cleaning and drying with standardized machines and guaranteed processes or entirely customized equipment.

We have 3 manfacturing sites, 2 innovation hubs and more than 3.350 machines installed worldwide. We are constantly developing the most efficient process for our clients to achieve perfect surface quality. With more than 130 engineers, 150 global service experts at 20 service locations we work to make RENA machines a long-term success story.

For more information, visit https://www.rena.com.

  Products

  • Revolution+
    Semi-automated wet bench for multi-step processes...

    • Features and Benefits
    • Dry-to-Dry Capabilities
    • Up to 200 mm wafer
    • Multi-Step Sequences with parallel processing
    • SECS/GEM compatible
    • Low footprint
    • Up to 125 wph
    • Optional FFUs
    • EFEM Versions available
    • Stainless-steel version for Solvent application
  • Convergence
    Fully automated Processing Platform...

    • Features and Benefits

    • Dedicated versions for 200 and 300 mm
    • Precision - perfect process monitoring for tight process control
    • Fully customizable to any customer specification or wish
    • Full compliance with the SEMI standard
    • Carrierless or LMC processing
    • High throughput 
    • Up to GEM300 compatible
    • Stainless-steel version for Solvent application
  • BatchGlass P3 | Production Tool
    Fully automated Platform

    Through Glass Via (TGV) Processing Equipment
    ...

    • High-end Advanced Production Platform for Glass Panels

    Features and Benefits

    • Processing of large format panels such as 510 x 515 mm² and 310x310 mm²
    • Suitable for etching and cleaning processes (combinations possible)
    • Optimized tank design and flow for excellent homogeneity of etching
    • Optimized footprint, modular design, and high cleanroom capabilities
    • 24/7 operation and easy upscaling of process
    • Highest surface cleanliness and with optimized pre and postcleaning
    • FOUP-to-FOUP Processing
    • SECS/GEM300 MES standard
    • SEMI standard compliant
    • Pilot Line and HVM suited
  • BatchGlass Lab
    Semi-automated Platform

    Through Glass Via (TGV) Processing Equipment
    ...

    • Advanced Processing Platform for Glass Panels

    Features and Benefits

    • Processing of large format panels up to 600 x 600 mm² especially for all standard formats
    • Suitable for etching and cleaning processes (combinations possible)
    • Optimized tank design and flow for excellent homogeneity of etching
    • Optimized footprint and modular design
    • 24/7 operation and easy upscaling of process
    • Highest surface cleanliness and with optimized pre and postcleaning
    • Full MES and automation compatibility 

Categories

200 Equipment, Assembly
  • Cleaning; Washing Equipment for Assembly & Packaging
    • 207 Equipment, Process
  • Cleaning; Washing; Drying Equipment for Substrate, Fab Processing
  • Etching; Stripping; Ashing - Dry and Wet Equipment
  • Plating; Electro Chemical Plating; Deposition Systems
    • 700 Manufacturing Services
  • Repair; Rebuild; Install Equipment; Maintenance Services; Spare Parts
    • 701 Manufacturing Services or Consulting
  • Automation & Robotics
  • Equipment; Hardware; Product Design, Integration and Manufacturing
  • Manufacturing Process Support and Development
  • Wafer Handling

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