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ATOCK Co., Ltd.

Joso-shi,  Ibaraki 
Japan
https://atock.com/
  • Booth: Q6235

Precision quartz components: Polishing, welding & machining.

Overview

[Supporting Advances in Front-End Semiconductor Manufacturing with High-Precision Quartz Glass Processing]

We are a specialized engineering firm featuring high-precision "polishing," "welding," and "precision grinding & machining" of quartz glass and other specialty glass materials used in front-end semiconductor manufacturing equipment.

We have a proven track record of supplying high-quality components for front-end equipment—including deposition (CVD/PVD), etching, diffusion/thermal processing, and cleaning—where extreme precision and cleanliness are required.

■ Our Core Strengths & Key Technologies
• High-Precision Polishing: Ultra-precision polishing meeting strict flatness and surface roughness specifications.
• Complex Welding & Joining: Expert glass welding ensuring excellent airtightness and thermal resistance.
• Precision Grinding: High-precision dimensional control, capability for complex channel structures, and micro-machining.

■ Main Products & Components
• Process Chamber Components (Quartz windows, rings, flanges, etc.)
• Quartzware & Fixtures for Wafer Processing (Bell jars, tubes, boats, etc.)
• Custom & Made-to-Order Fabrication (From single-piece prototypes based on drawings)

We provide flexible solutions tailored to your needs, from design consultation and prototyping to mass production. If you are looking to improve component precision or searching for a partner capable of complex quartz processing, please feel free to visit our booth.


  Products

  • High-precision cylinder Lapping and polishing
    ~φ500 ~3100l
    ・Parent Materials for Quartz Fiber
    ・Light Guides
    ・Target Rods
    ・Polarization beam splitter...

  • ~φ500 ~3100l
    ・Parent Materials for Quartz Fiber
    ・Light Guides
    ・Target Rods
    ・Polarization beam splitter
  • Counter-bore (Non-through) Processing
    ・Circular, square, and irregular shapes
    ・Customized edge chamfering
    and surface condition control
    ・Multi-stage depth processing
    ...

  • ・Circular, square, and irregular shapes
    ・Customized edge chamfering
    and surface condition control
    ・Multi-stage depth processing
  • High precision Hole Opening and Polishing
    φ0.1mm~
    ・Shower plate
    ・Flow cell
    ・Quartz cell...

  • φ0.1mm~
    ・Shower plate
    ・Flow cell
    ・Quartz cell
  • Rod manufacturing
    φ0.4mm~
    ・optical fiber
    ・Rod for optical
    ・and research
    ...

  • φ0.4mm~
    ・optical fiber
    ・Rod for optical
    ・and research
  • Plate Manufacturing
    Cutting of circular and irregular
    shapes from flat plates
    ...

  • Cutting of circular and irregular
    shapes from flat plates
  • Integrated Processing
    ・Integrated processing combining polishing,
    cutting, grinding, and welding
    ・Complex multi-process specifications managed and executed under unified process control...

  • ・Integrated processing combining polishing,
    cutting, grinding, and welding
    ・Complex multi-process specifications managed and executed under unified process control
    ・Hole opening, step processing, groove cutting, internal and external cutting, thread cutting, and various other shape processing of quartz glass and optical glass

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