MTI Instruments Proforma™ non-contact wafer metrology systems help manufacturers optimize thin-film processes, improve process control, and increase production yield.
The growing importance of wafer stress measurement in semiconductor manufacturing as advanced packaging, heterogeneous integration, silicon carbide (SiC), gallium nitride (GaN), MEMS, and photonics applications continue to drive demand for tighter process control, improved manufacturing consistency, and higher device reliability.
As semiconductor manufacturing processes become increasingly complex, engineers are placing greater emphasis on monitoring wafer stress to optimize thin-film deposition, validate process changes, detect equipment drift, and improve production yield. Full-wafer stress characterization provides valuable insight into process stability, enabling manufacturers to identify subtle variations before they impact downstream operations.
Vitrek’s Proforma™ family of non-contact wafer metrology systems, exclusively distributed by VASTi Technologies, provides high-precision measurement of wafer stress, bow, warp, curvature, thickness, and total thickness variation (TTV). By capturing comprehensive full-wafer measurement data, Proforma systems help engineers visualize stress distribution, evaluate process changes, and support statistical process control (SPC) initiatives throughout semiconductor manufacturing.
“Wafer stress has become much more than a laboratory measurement—it is now an important indicator of manufacturing performance,” said Ken Ameika, VP Global Sales at Vitrek. “Understanding how stress changes throughout fabrication enables engineers to optimize processes, improve repeatability, and support higher manufacturing yields.”
VASTi Technologies is a professional distributor of high-end instrumentation, serving as Vitrek LLC's agent in Asia, covering Taiwan, Japan, the Philippines, Vietnam, Thailand, and other regions, offering professional instrumentation sales and services.
We cordially invite you to visit our booth at SEMICON Taiwan 2026.
Booth : R8119
Location : 4th Floor, TaiNEX 2, Taipei, Taiwan
September 2-4, 2026
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Phone: +886-2-29588760
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