The system enables visualization and analysis of residual film leakage, non-uniformity, residue, and other micro-scale defects, providing detailed information on their location, distribution, and morphology.
Conventional analysis methods such as FT-IR, GD-OES, TEM/SEM, LIBS, contact-angle, and AFM can be time-consuming or may require destructive sample preparation. HySID-D-F0500 enables fast, non-contact, non-destructive optical inspection, helping reduce the need for additional analysis processes.
Features:
- Fast, Non-Contact & Non-Destructive Inspection
- VIA / Contact Hole OPEN / NOT OPEN Detection
- Line Edge Overflow Detection
- Leakage, Residue & Non-Uniformity Detection
- Defect Distribution & Morphology Analysis