maxon

This compact dual-axis gonio stage enables precise angular positioning around Rx and Ry axes, ideal for optical alignment and semiconductor inspection. With a 60 × 60 mm footprint and a rotation center 60 mm above the table, it features two integrated motors with ceramic spindle drives for smooth, controlled motion. The stage includes preloaded, vacuum-compatible gonio guidance for high stiffness and minimal backlash, ensuring reliable performance in cleanroom environments. Available with ball screw, metric, or trapezoidal spindles, it supports high axial loads and fine configurability for demanding applications.

Key Benefits:

• Compact design for space-constrained setups
• High-precision pivoting motion for Rx, Ry axes
• Vacuum-compatible components for cleanroom use
• Configurable spindle options for tailored performance
• Ideal for wafer alignment, optical testing, and metrology

maxon spindle drives convert rotary to linear motion with high precision and reliability, making them ideal for semiconductor applications like wafer handling, metrology, and micro-positioning. Their compact design integrates motors, gearheads, and screw drives with axial bearings to support high axial loads. These systems offer high feed forces up to 2655 N, excellent power density, and smooth, backlash-free motion. Available in ball screw, metric, ceramic, and trapezoidal variants, they are configurable to meet specific performance needs. Designed for cleanroom and vacuum environments, maxon spindle drives ensure consistent, contamination-free operation. With stroke lengths from 5–50 mm and resolutions down to 8.9 μm, they deliver repeatable, accurate positioning in space-constrained, high-demand automation systems.

High dynamics and precision are crucial to success in the semiconductor industry. Strain wave gearheads provide these qualities: They are extremely precise, efficient, and their exceptional rigidity enables highly dynamic positioning applications.

maxon standard strain wave gearheads transmit high torques precisely and efficiently. They offer a high reduction ratio in a very compact space and can be combined with a wide range of maxon drive components. 

• Gearhead                      ∅ 55 - 62 mm
• Gearhead length           30 – 34 mm
• Intermittent torque         up to 40 Nm
• Overload torque            up to 80 Nm