Swagelok Company

> Delivers quick, precise dosing over the course of millions of cycles in even the most demanding applications and features enhanced actuator technology with a response time as low as 5 ms 
> Resistant to corrosive gases with a valve body comprised of proprietary ultrahigh-purity Swagelok 316L VIM-VAR stainless steel 
> Can be heated up to 200°C while keeping the pneumatic actuator below maximum operating temperature of 150°C 
> Delivers a flow coefficient (Cv) up to 0.7 (with optional custom (factory-set) versions available that deliver a flow coefficient of 0.5–0.7 Cv) 
> Maintains the same footprint as Swagelok industry-standard ALD valves and features an integrated thermal isolator to maximize limited space near the reaction chamber 

> Vacuum-only insulation can be augmented with multi-layer insulation to address radiant heat transfer 

> Fully annealed condition eases hose routing through form-fit-and-stay capability 

> 316L stainless steel wetted surfaces are suitable for liquids and gaseous media 

> Wetted braze material meets AMS 4777 (nickel alloy) 

> Colored polyolefin sleeves allow for color-coding process lines 

> Available in sizes ½, ¾, and 1 in.  

> Easy installation and compact design with minimal clearance requirements 

> Precision manufactured gasket for maximum performance 

> Standard surface finish on glands and bodies is a roughness average of 10 µin. (0.25 µm) Ra 

> Side-load retainer gasket for easy installation and minimal clearance for removal 

> Test port at two locations for easy leak testing 

> Material heat code is stamped on glands and all shapes to ensure raw material traceability 

> Female threads are silver plated to prevent galling and ensure easy, consistent assembly 

> Variety of VCR face seal glands and bodies available with controlled surface finishes; they are electropolished and specially cleaned to meet ultrahigh-purity system requirements