ULVAC, Inc.

Explore ULVAC’s cutting-edge lineup at SEMICON — tailored for peak precision, flexibility, and production excellence across semiconductor and advanced packaging industries:

• ENTRON‑EXX Sputtering System
  A modular, multi-chamber PVD platform capable of supporting up to 12 modules—ranging from PVD and pre‑clean to heating and cooling. Available in space-efficient Single or Tandem configurations, it packs advanced data analytics for improved yields, maintenance, and operational flow.

• NA‑1500 Dry Etching (Ashing) System
  Designed for Fan-Out Panel Level Packaging (FO‑PLP) and large‑area substrates (up to ~500 mm or more), this low-temperature (<140 °C) plasma asher offers high photoresist removal rates (>1.5 µm/min) and exceptional uniformity (±10 %). Ideal for resist stripping, plasma cleaning, surface modification (hydrophobic ↔ hydrophilic), descum, and organic film etching.

• NLD‑5700 Dry Etching System
  Powered by proprietary Neutral Loop Discharge (NLD) plasma tech, this production-grade etcher delivers ultra‑low pressure, high‑density plasma, and low electron temperatures—ideal for quartz, glass, crystal, LN, and LT substrates. With options for cassette, aligner, etching, and ashing chambers, it excels in etching optical devices, microlenses, photonics, and μ‑TAS components.

• uGmni Series (e.g., uGmni‑200)
  This modular cluster system integrates deposition and etch processes on a unified transfer core. Featuring customizable core shapes (Square, Hexagon, Heptagon) and common operation panels, uGmni reduces spare parts and streamlines processes. It seamlessly handles sputtering, etching, PZT layer processing, descum/ashing, packaging prep, and insulating film treatment.

• Descum & Plasma Systems for Advanced Packaging
  ULVAC supports sophisticated packaging needs, like descum and plasma surface treatments, complementing its flagship systems with precise, high-throughput cleaning and treatment stages suited for FO-WLP and panel-level manufacturing workflows.

Experience our full range of cutting-edge components designed to advance semiconductor and high-tech production. From dry pumps and leak detectors to plasma analysis and deposition controllers, these solutions enable greater accuracy, performance, and innovation for the factories of the future.

LS Series Dry Screw Vacuum Pumps
Designed for high-load, continuous operation, the LS Series delivers clean, oil-free pumping with excellent durability and energy efficiency. Ideal for demanding semiconductor and industrial applications requiring stable, long-term performance.

CR Series Air-Cooled Dry Vacuum Pumps
A compact, maintenance-friendly pump that eliminates the need for cooling water. With air-cooled operation and low power consumption, the CR Series provides efficient, reliable vacuum performance in a small footprint—perfect for labs and production lines.

HELIOT 900 Series Leak Detectors
High-sensitivity helium leak detectors engineered for fast, accurate leak detection. With advanced turbo pumping technology and intuitive operation, the HELIOT 900 ensures process reliability and uptime across semiconductor, R&D, and manufacturing environments.

Qulee with YTP Quadrupole Mass Spectrometer + Differential Pumping Kit
A powerful tool for residual gas analysis, the Qulee with YTP option enhances sensitivity and stability, even under higher pressure conditions. Equipped with differential pumping, it provides precise diagnostics for process monitoring and contamination control.

G-Tran SH/ST200 Precision Ionization Gauges
Robust Bayard-Alpert type ionization gauges delivering highly accurate pressure readings from high vacuum to ultra-high vacuum ranges. Their reliability and precision make them essential for monitoring and controlling advanced vacuum systems.

CRTM-R1 Series Quartz Crystal Deposition Controllers
Next-generation controllers offering ultra-high film thickness and deposition rate resolution (0.0022Å). With multi-sensor support, advanced logging, and simultaneous multi-material control, the CRTM-R1 sets the benchmark for thin film process precision.

ULVAC Analytical Vacuum Solutions

ULVAC offers a comprehensive lineup of vacuum pumps engineered to meet the demanding needs of analytical instrumentation. Whether precision, reliability, or compact performance is required, our solutions deliver the stable vacuum environments critical for accuracy and repeatability.

• GHD Series Dry Pumps – Designed for clean, oil-free operation with low maintenance requirements. The GHD Series ensures stable vacuum performance for analytical systems that demand long-term reliability and minimal contamination risk.
• GLD Series Rotary Vane Pumps – High-performance, quiet, and compact, the GLD Series delivers consistent pumping speed and reliability for sensitive analytical systems.GLD Series Rotary Vane Pumps – High-performance, quiet, and compact, the GLD Series delivers consistent pumping speed and reliability for sensitive analytical systems.
• DA Series Dry Diaphragm Pumps – Compact and versatile, ULVAC’s DA Series offers a wide range of pumping speeds and ultimate pressures to fit diverse needs. Its clean, quiet design is ideal for lab benches, supporting applications from wafer handling to general non-corrosive laboratory use.

ULVAC pumps deliver the precision, durability, and clean performance analytical applications rely on.

ULVAC supports your equipment with world-class service

ULVAC is committed to maximizing the performance and longevity of your equipment through tailored service and support.

Our comprehensive service solutions ensure reliable operation, reduced downtime, and continuous improvement for your production needs.