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Agileo Automation

POITIERS,  France
https://www.agileo.com
  • Booth: 877

For All Your Control & Connectivity Solutions!

Overview

Agileo Automation provides control and connectivity solutions for semiconductor equipment manufacturers

Our customers are Original Equipment Manufacturers of production machines that equip the factories of semiconductor and precision electronics companies worldwide. We provide SECS/GEM and GEM300 licensed libraries, EDA Interface Libraries, SECS/GEM Host Emulation and Test Systems, equipment system control libraries and cost-competitive integration services to a global installed base. As a complete solution provider, we develop software modules that are integrated either by our engineering team or by our customers for their production process and metrology machines.

Agileo has first hand understanding of the issues faced by semiconductor equipment manufacturers and instills this mindset throughout the company by:

- Understanding the role of the machine and its hardware architecture
- Working with end customers' tool owner and IT team
- Bringing the machine into production within the agreed deadlines
- Prioritizing the support of software and technicians in the field

  Products

  • Agil'GEM
    Agil'GEM is a SECS/GEM and PV2 Software library for semiconductor, electronics and photovoltaic production equipment connectivity....

    • Agil'GEM Supports:

    GEM services:

    • Equipment communication state and control state
    • Process program
    • Collection event sending
    • Variable data collection
    • Status data collection
    • Remote control
    • Alarm management
    • Equipment constants
    • Equipment Terminal Services
    • Clock
    • Trace data collection
    • Limits monitoring

    SEMI standards:

    • SEMI E4 SECS-I (serial protocol)
    • SEMI E37.1 HSMS-SS (ethernet protocol)
    • SEMI E5 SECS-II (message format)
    • SEMI E30 GEM
  • Agil'GEM300
    Agil'GEM300 is a complete .NET/C# solution for GEM300 connectivity. It handles the complexity of GEM300 automation and provides a simple interface to connect a semiconductor equipment controller application to the factory host....

    • GEM300 services

    • Carrier and load port management
    • Carrier ID verification
    • Slot map verification
    • Both manually and through OHT 
    • Process job management
    • Control job management
    • Substrate tracking in the equipment with substrate ID verification 
    • Equipment performance tracking
    • Module performance management

    Collaboration between standards managed by Agil’GEM300 with minimal integrator interaction 

    SEMI standards

    The following are supported in Agil'GEM300:

    • SEMI E-87 – Carrier management
    • Fixed buffer
    • Internal buffer 
    • SEMI E-40 – Processing management 
    • SEMI E-94 – Control job management 
    • Material redirection
    • SEMI E-90 – Substrate tracking
    • Single substrate tracking 
    • Batch tracking 
    • SEMI E-116 – Equipment performance tracking
    • SEMI E-157 – Module process tracking 
    • SEMI E-39 – Object services 
    • SEMI E-30 – GEM​​​​​​
    • SEMI E4 – SECS-I (serial protocol)
    • SEMI E37.1 – HSMS-SS (ethernet protocol)
    • SEMI E5 – SECS-II (message format)
  • Agileo Automation Equipment Control Framework
    Robotic Control, Scheduling and GEM300 Connectivity of Semiconductor Cluster Tool A²ECF Semi is a software framework for process or metrology equipment control including EFEM (robotics loading platform) management....

    • Higly customizable, this SEMI E95 compliant framework proposes a standardized way to present user interface for semiconductor applications:

    • Multiuser management with access rights (operator, process engineer, field service engineer for example)
    • Automatic trace generation with tools to analyze equipment activity
    • Operator actions recording
    • EFEM devices management such as (contact us for list of supported devices):
    • Wafer handlers with one or dual arms
    • Pre-aligners
    • Load Ports and FOUP Openers
    • Scribe readers
    • Schedulers for wafer flow sequencing

    Data collection to the Fab Host and Remote control through SECS/GEM and PV2 interface library Agil'GEM or GEM300 (GEM + 300mm automation standards including in particular Carrier Management, Process Job, Control Job and Substrate Tracking through Agil'GEM300)

Categories

1 FLEX
  • Tools & Equipment
    • 206 PV Equipment
  • Integration and Automation
    • 401 Sub-systems
  • Computer; Control; Comms.; Data Acquisition Systems
  • Handling; Transfer; Loading Systems; Lifting devices
  • Motion control systems; Servo control systems & Components
  • Optics; Lens Products; Auto-Focus Systems
  • Process Monitoring systems
    • 500 Factory Monitoring & Control Systems (FMCS)
  • Data Collection; Building control systems
  • Equipment Interface; Communication Protocols
  • Process Controls
    • 502 Material Handling Systems
  • Robotics; Transfer Systems
  • Stockers; Storage, AMHS
    • 600 Communication Software
  • Equipment Interface; Communication Protocols
    • 602 Manufacturing Software
  • Factory Automation; Cell Controller Software
  • Manufacturing Execution Software (MES)
  • Production Control software
  • Test Programs
    • 603 Simulation, Analysis; Modeling Software
  • Simulation; Characterization; Verification Software
    • 701 Manufacturing Services or Consulting
  • Automation & Robotics
  • Factory; Industrial Control; Utilization & Automation
  • Software Programming; Software Development
  • Wafer Handling

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