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EVER PURE APPLIED MATERIALS CO., LTD.

Miaoli County,  Taiwan
http://www.epam.com.tw/
  • Booth: 590

Affordable advanced filtration solutions for optimal purity.

Overview

Welcome to Ever Pure Applied Materials at SEMICON WEST 2025!

Founded in 2007 in Taiwan, we specialize in high-performance filtration solutions for industrial and semiconductor applications. Discover our perfluorinated filter regeneration technology, CMP filters, UHMWPE sintering porous parts, and PES membranes for cost-effective, superior purity and efficiency.


  Press Releases

  • Ever Pure Applied Materials Co., Ltd. (EPAM) is a filter cartridge manufacturer based in Taiwan, dedicated to delivering high-quality filtration solutions. Its primary customer base spans a wide range of industries, including semiconductors, flat panel displays, food and beverage, biotechnology, and petrochemicals—all of which demand exceptional quality and reliability in filtration. Through advanced technology and rigorous quality control, EPAM has earned the trust of these highly demanding sectors. 

    EPAM’s proprietary perfluoropolymer filter regeneration technology has been validated by leading semiconductor foundries and is now officially used in semiconductor manufacturing processes. Perfluoropolymer filters are widely applied in wafer fabrication and play a critical role in yield performance. Due to the semiconductor industry’s extremely high purity requirements for fluorinated materials, only a few manufacturers can produce compliant perfluoropolymer filters. As semiconductor processes move into the nanometer scale, suppliers capable of producing nanometer-grade fluorinated filters become even more scarce, resulting in high costs and long lead times. 

    Moreover, fluorinated materials are non-biodegradable, and tens of thousands of perfluoropolymer filters are discarded annually by the semiconductor industry, placing a significant burden on the environment and contributing to global warming. To address this issue, EPAM invested years in R&D to successfully develop a regeneration technology capable of restoring used and discarded filters to meet the specifications of new filters. Validated in real-world applications, the regenerated filters exhibit equivalent pressure drop, cleanliness, and service life as new ones, fully meeting customer requirements. 

    Several semiconductor customers have already implemented EPAM’s regenerated filters in SC1, SPM, and phosphoric acid filtration processes, with more customers currently undergoing qualification.

    EPAM’s innovative technology not only reduces the cost and lead time of filtration but also makes a meaningful contribution to environmental sustainability, underscoring the company’s leadership in both technological advancement and corporate social responsibility.


  Products

  • Filter Regeneration
    EPAM’s proprietary filter regeneration technology restores used perfluoropolymer filters to original specifications. This technology has been validated and adopted by multiple semiconductor manufacturers. ...

  • Product category: All Perfluoropolymer filters, including capsule or cartridge types in the semiconductor process.

    Pore size:  10um to 2nm.

    Application:  Filters using in chemicals manufacturing process, SC1, SC2, SPM, H3PO4 and backend process. 

  • Terepure CMP Filters
    Terepure CMP Series is designed for the filtration of alumina, ceria, and silica slurry in CMP. The special graded-density design provides excellent retention of agglomerates, which are disruptive to the CMP process....

  • Filter Type: Cartridge or Capsule

    Filter Pore Size: 0.1um to 13um

    Length: 5" to 40" for cartridge

    Connection Type of Capsule: 3/8" flare or quick connection.

  • All Fluoro Filter
    EPAM All Fluoro Series is a highly chemically-resistance cartridge owning to its PTFE membrane and PFA support material and PFA components....

  • Filter Type: Cartridge or Capsule

    Pore Size: 30nm up to 10um

    Diameter: 69mm or 83mm for cartridge.


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