Astro Thermal Technology Corporation

✽G Furnace is a vertical furnace tube newly manufactured by Genes Tech in 2020, which can be used for 150mm or 200mm wafers.

✽Using EtherCAT to connect the communication between modules, it is not only faster, but also relatively reduces the design of circuit board control,

    so that engineering maintenance personnel can handle abnormalities faster. It can effectively reduce MTTR.

✽The processes that can be produced include oxide layer (Gate Oxide/Wet Oxide/Dry Oxide/Trans-LC Oxide), high temperature annealing (Drive In/Anneal),

    and low temperature tempering (Alloy), and low pressure deposition (LPCVD: Nitride, POLY, DPOLY, TEOS) and photoresist baking (PIQ, SOG).

This machine is designed to be externally connected to equipment such as the TEL ACT8, TEL ACT12, and TEL MARK8. It is used for external water circuit management of photoresist temperature-controlled double-layer tubes.

The functions of the equipment include:

◆Maintaining negative pressure inside the tubes to prevent water leakage and water permeation into the photoresist tubes.

◆Real-time monitoring of the water pipe pressure and issuing alarms in case of abnormal pressure.

We are a professional semiconductor equipment company specializing in customized equipment upgrades and retrofit services. With a strong engineering team and deep industry experience, we help clients enhance their production efficiency by tailoring equipment modifications to meet specific process requirements.

In addition, we offer sourcing and fabrication of replacement parts and alternative components, ensuring continued operation and cost-effective solutions when original parts are no longer available. Our goal is to provide reliable, flexible, and efficient services that support the evolving needs of the semiconductor industry.

• Process upgrades and optimization
• Heater system modifications
• Open cassette conversion to SMIF indexer
• Tool layout redesign for improved efficiency