APS Materials engineers advanced solutions for extending the life and performance of Electrostatic Chucks (ESCs), a critical component in semiconductor wafer processing. Our proprietary dielectric coatings are specifically designed for durability, purity, and reliability, ensuring stable wafer clamping and consistent process performance over extended operating cycles.
Each ESC is treated with ultra-dense, high-purity dielectric materials that deliver breakdown voltages exceeding 4,000 V, significantly enhancing safety margins while maintaining strong electrostatic holding forces. The coatings are optimized to resist thermal cycling, chemical attack, and particle generation, which are leading causes of ESC degradation. By reducing contamination and wear, APS helps fabs maintain higher yields and minimize downtime.
In addition to exceptional dielectric strength, APS coatings allow for fast and efficient de-chucking, improving throughput and reducing risk of wafer damage during handling. Our processes ensure compatibility with OEM specifications, whether you require full refurbishing or a core-exchange solution tailored to your production schedule.
Semiconductor manufacturers rely on APS ESC refurbishments not only to cut replacement costs but also to extend tool reliability and stability. The result is lower cost of ownership, longer ESC lifespan, and more predictable process performance. With decades of experience in plasma-resistant coatings and thermal spray technologies, APS delivers consistent, repeatable results that keep fabs running at peak efficiency.
From R&D labs to high-volume manufacturing, our ESC solutions provide a proven alternative to costly OEM replacements, helping you achieve operational efficiency without sacrificing quality. APS ensures that every refurbished ESC meets the demands of modern semiconductor environments, where uptime, precision, and cleanliness are paramount.