Air tech System Co., LTD.

Hukou Township,  Hsinchu County 
Taiwan
https://www.air-tech.com.tw/

• Booth: 887

AIRTECH is specializing in cleanroom equipment.

Overview

AIRTECH System Co., Ltd. (Taiwan) was established in 1990 as a joint venture between a Taiwanese domestic company specializing in advanced air-conditioning systems, and Japan’s largest cleanroom equipment expert, Japan AIRTECH Co., Ltd. 

  The company was formed with the objective of introducing to Taiwan the most advanced cleanroom designs, fabrication, and equipment by employing the joint venture’s proprietary technology, systems and research. 

  The company was likewise formed with the purpose of being able to contribute to the local industry and the economy as well as upgrade the industrial knowledge and technology in Taiwan. 

  Press Releases

• AIRTECH Secures Global Trust with CE and UL Certified Fan Filter Units at SEMICON West 2025 (Sep 15, 2025)

  AIRTECH SYSTEM Co., LTD. (ATS), a global leader in cleanroom solutions, is spotlighting its CE- and UL-certified Fan Filter Units (FFUs) at SEMICON West 2025. The company says the certification milestone underscores its commitment to safety, compliance, and long-term reliability for the semiconductor sector.

  The FFU — a critical backbone of contamination control in fabs — is designed to combine ultra-low energy consumption with sustainable performance. According to certification body Ente Certificazione Macchine (ECM), AIRTECH’s FFU has been verified to comply with EN IEC 61000-6-2:2019 under the EMC Directive 2014/30/EU and EN 60204-1:2018+A1:2025 under the Low Voltage Directive 2014/35/EU. In addition, its EC motor has been validated against EN 60034-1:2010/AC:2010 for LVD compliance. Together, these certifications ensure the units meet stringent European requirements for electromagnetic compatibility, electrical safety, and operational reliability.

  Beyond Europe, AIRTECH’s FFU portfolio has also achieved UL certification, a hallmark of safety and reliability in the North American market. UL testing validates the FFU’s electrical integrity, fire safety, and long-term durability — critical benchmarks for fabs seeking dependable systems in highly regulated and high-risk environments. With UL certification, ATS offers fabs a globally trusted solution that meets compliance expectations not only in Europe but also across North America and international projects.

  “With semiconductor fabs pushing toward both performance and sustainability, certification is no longer optional — it is a baseline of trust,” said an ATS spokesperson. “Our CE and UL-certified FFUs provide global customers with the assurance that their contamination control infrastructure meets the highest safety and compliance standards.”

  Industry analysts note that as fabs expand worldwide, CE and UL certifications help procurement teams accelerate adoption, minimize regulatory risk, and strengthen investor confidence.

  Visitors to Booth 887 at the Phoenix Convention Center will be able to see ATS’s next-generation FFU on display, alongside other innovations in modular cleanroom design and energy-saving technologies.

  More Information

  For more information on AIRTECH SYSTEM Co., LTD. and its full line of cleanroom and contamination control solutions, please visit www.air-tech.com.tw

   or contact AIRTECH directly at [email protected]

  📺 YouTube: https://www.youtube.com/@airtech5054

  💼 LinkedIn: https://www.linkedin.com/company/airtech-tw/

  📘 FaceBook: https://www.facebook.com/airtech.tw/

• AIRTECH Showcases Advanced Air Shower Systems for Semiconductor Cleanrooms at SEMICON West 2025 (Sep 15, 2025)

  As semiconductor devices grow smaller, the industry faces a bigger challenge: protecting wafers from microscopic contaminants that threaten yield. AIRTECH SYSTEM Co., LTD. (ATS) is addressing this challenge head-on by exhibiting its latest Air Shower Systems (AAS) at SEMICON West 2025 — engineered to remove particles from personnel and materials before entering controlled cleanroom environments.

  AIRTECH’s Standard Air Shower deploys high-velocity HEPA-filtered air jets with a particle removal efficiency of ≥99.99% at 0.3 μm, supported by DC brushless motors and LED lighting for 40% higher energy efficiency compared to traditional designs. Its modular construction allows flexible installation, while double-layer insulation and noise-reduction design ensure ergonomic operation.

  For fabs requiring both personnel and material entry, AIRTECH offers the Roll-up Air Shower, equipped with an integrated roll-up shutter door that eliminates the need for additional space. Its patented origin nozzles deliver superior decontamination, while automatic systems minimize noise and energy consumption.

  Both models are designed in compliance with international cleanroom SOPs, and certified under CE and MET standards, underscoring their global reliability.

  “Semiconductor fabs can’t afford compromises in cleanliness,” said an ATS spokesperson. “Our air shower systems are engineered not just to protect wafers, but also to optimize efficiency, reduce energy use, and meet the operational needs of high-volume fabs worldwide.”

  With compact footprints, automated controls, and modular scalability, AIRTECH’s AAS solutions provide fabs with a robust contamination control line of defense — critical as the industry advances into smaller process nodes where a single particle can disrupt production.

  Conference attendees can see both the Standard and Roll-up Air Shower live at Booth 887, Phoenix Convention Center, alongside ATS’s full suite of modular and energy-saving cleanroom solutions.

  More Information

  For more information on AIRTECH SYSTEM Co., LTD. and its full line of cleanroom and contamination control solutions, please visit www.air-tech.com.tw

   or contact AIRTECH directly at [email protected]

  📺 YouTube: https://www.youtube.com/@airtech5054

  💼 LinkedIn: https://www.linkedin.com/company/airtech-tw/

  📘 FaceBook: https://www.facebook.com/airtech.tw/

• Precision in the Nanometer Era: AIRTECH Unveils Thermal Clean Chamber at SEMICON West 2025 (Sep 15, 2025)

  Semiconductor manufacturing has entered the nanometer era, where even the slightest variation in temperature can disrupt production yields. At SEMICON West 2025, AIRTECH SYSTEM Co., LTD. (ATS) is presenting its Thermal Clean Chamber (TCC), a high-precision temperature and humidity control system designed specifically for advanced fabs.

  The TCC-60S, AIRTECH’s latest model, is an ISO Class 5 (Class 100) cleanroom chamber engineered for ultra-precise environmental control. It achieves temperature uniformity within ±0.1°C and stability within ±0.03°C, while maintaining humidity between 40% to 60% RH. Equipped with multi-layer safety circuits, the TCC supports humidity requirements from 5% to 40% RH and integrates HEPA and non-woven pre-filters to ensure a contamination-free process environment.

  The chamber combines air conditioning, heating, cooling, and precision airflow systems in a modular enclosure. Key features include:

  • PID control with ultra-high-responding components for climate accuracy
  • Customizable dimensions to match fab layouts and equipment footprints
  • Integrated display alarms & safety circuits covering water leakage, heat prevention, and abnormal temperature detection
  • LED lighting and ergonomic design, enhancing both visibility and energy efficiency

  “Every chip produced today depends on precision measured in billionths of a meter,” explained an ATS representative. “The TCC delivers climate control accuracy that aligns with the semiconductor industry’s most demanding requirements, safeguarding both process stability and product integrity.”

  With its modular adaptability, the TCC helps fabs streamline installation, optimize space, and minimize energy consumption. Industry analysts emphasize that such innovations are increasingly critical as fabs balance operational excellence with sustainability targets.

  Attendees at Booth 887, Phoenix Convention Center will be able to explore how AIRTECH’s Thermal Clean Chamber is redefining environmental control for next-generation semiconductor production.

  More Information

  For more information on AIRTECH SYSTEM Co., LTD. and its full line of cleanroom and contamination control solutions, please visit www.air-tech.com.tw

   or contact AIRTECH directly at [email protected]

  📺 YouTube: https://www.youtube.com/@airtech5054

  💼 LinkedIn: https://www.linkedin.com/company/airtech-tw/

  📘 FaceBook: https://www.facebook.com/airtech.tw/

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