The LAUDA Semistat thermoelectric system offers precise, energy-efficient temperature control from -20 to 90°C, optimizing semiconductor plasma etching processes. Designed for reliability and sustainability, it provides key benefits:
- Precise & Stable Control – Maintains ±0.1 K accuracy for consistent wafer processing.
- Energy Efficient – Reduces power consumption by up to 90% compared to compressor-based systems.
- Compact Design – Allows underfloor installation, minimizing cleanroom space usage.
- Eco-Friendly – Refrigerant-free operation with non-PFAS fluid options for sustainability.
- Minimal Fluid Usage – Small 2.5L reservoir reduces costs and waste.
- Low Maintenance – Virtually maintenance-free with only one moving part, the pump.
- Fast & Responsive – Peltier-based thermoelectric technology ensures rapid, dynamic temperature control.