TOFWERK

Complete process control. Rugged and flexible process monitoring and control. The Semicon Process Analyzer uses electron ionization time-of-flight mass spectrometry to simultaneously detect and analyze all precursors, byproducts, and trace species in real time. Equipped with powerful, high-speed software, this process solution is designed to handle challenging process requirements and enable fast, non-intrusive detection of process deviations in semiconductor processes. 
More information at: https://www.tofwerk.com/products/semicon-process-solution/  
Contact our team: [email protected] 

Our AMC Solutions provide real-time detection of known and emerging airborne molecular contaminants (AMCs) using advanced chemical ionization time-of-flight mass spectrometry. With high-resolution compound identification, sampling with up to six reagent ions and pptV detection limits our AMC Solutions offer simultaneous, real-time measurements across multiple AMC categories. Features like ultra-soft ionization, rapid polarity switching, and a compact design make them ideal for semiconductor applications, ensuring comprehensive AMC control.