Wafer Inspection and Metrology - TR7950Q SII
The TR7950Q SII can perform Wafer Macroscopic 3D Inspection and micro measurement metrology. The TR7950Q SII can inspect Advanced WLP, Wafer Frame, Patterned Wafer, Wafer Bumping, WLCSP, through-silicon via (TSV), and more.
TR7950Q SII - Wafer Inspection and Metrology Platform
Features:
- High Resolution 1.2 μm Wafer Macroscopic 2D / 3D Inspection
- Precise Micro Measurements with Metrology Capabilities
- Ultra High-Speed TSV Metrology
- Inspection for: Advanced WLP, Wafer Frame, Patterned Wafer, Wafer Bumping, WLCSP, through-silicon via (TSV).
- TSV measurement capabilities: TSV depth, trench depth, oxide, nitride, PR, and PI film thickness.
- Cleanroom: Class 100 - ISO 5 Clean Room