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VON ARDENNE GmbH

Dresden,  Germany
http://www.vonardenne.com
  • Booth: 6180

Engineering tomorrow’s semiconductor deposition solutions

Overview

The world of semiconductors is always evolving. Meeting emerging requirements demands customer-oriented, flexible and new solutions. 

A deposition solutions specialist, VON ARDENNE offers comprehensive services to support our customers. Our high-precision engineering and materials science expertise enable custom design, engineering, manufacturing, commissioning and service for deposition equipment and components. 

Our strong legacy in vacuum technology and deposition solutions, as well as materials and optics technologies, mean we excel in developing leading-edge semiconductor processes and equipment to meet each customer’s unique requirements.


  Press Releases

  • VON ARDENNE, a global leader in precision coating systems and co-developed materials solutions, will introduce its new OPTA X300 deposition tool and the opening of ISO 5 and ISO 7 cleanrooms in Dresden, Germany. The company will unveil its new solutions in booth #6180 during SEMICON West, taking place October 7-9 in Phoenix. Additionally, VON ARDENNE will speak about the new tool platform at the “Next-Gen Photonics: Powering Tomorrow’s Technologies,” TechTALKS, on October 8 at 11:25 a.m. Mountain Time.

    “As the semiconductor industry pushes the boundaries of performance and miniaturization, VON ARDENNE is stepping into the US market with next-generation tool platforms, co-developed materials solutions, and custom refurbishment and upgrade services,” said Guido Ueberreiter, vice president of semiconductor strategy at VON ARDENNE. “Our approach enables semiconductor manufacturers to overcome complex deposition and vacuum challenges, particularly where legacy tools fall short or off-the-shelf solutions can’t meet emerging needs. Our OPTA X300 platform is purpose-built for high precision double-sided deposition to support the most demanding multilayer applications.”

    Flagship Showcase: OPTA X300

    At SEMICON West, VON ARDENNE will feature its OPTA X300 rotary disk coating system, the company’s flagship platform for sub-nanometer precision deposition on demanding substrates. Purpose-built for electrical and optical layers for memory, photonics and sensor devices, the OTPA X300 offers flexibility to support customers from R&D through high-volume manufacturing.

    The OPTA X300 platform will be installed at VON ARDENNE’s new ISO 5 cleanroom in Dresden, which serves as a cornerstone of its Technology and Applications Center. This facility enables customers to test, sample and co-develop deposition processes with access to industry-leading engineering and materials science expertise.

    Cleanroom Capabilities

    The new cleanroom features 200 m2 of ISO 5 (Class 100) assembly and test bays with airborne molecular contamination control (AMC) as well as 400 m2 of ISO 7 cleanroom manufacturing space in Dresden. The cleanroom is designed for semiconductor, optical and space applications and is extreme ultraviolet (EUV)-ready. The OPTA X300 will be available for customer demos and co-development projects starting mid-2026.

    “US fabs need more than tool suppliers, they need engineering partners who understand both the equipment and the materials science behind next-generation devices,” said Michael Schneider, vice president of semiconductor and precision optics at VON ARDENNE. “We’re bringing that integrated expertise to the US market—helping customers unlock new levels of performance, customization and yield.”

    Also being showcased at the VON ARDENNE SEMICON West booth are its HISS600, designed to deliver superior uniformity and high throughput for panel-level packaging, and VISS, a modular vertical coating platform ideal for scaling from lab to production for substrates up to 600 mm.

    For more information, visit https://vonardenne.us/industries-applications/semiconductors/. To schedule a demo or speak with a VON ARDENNE representative, contact [email protected].

    About VON ARDENNE

    VON ARDENNE combines high-precision engineering and unmatched depth in materials science expertise to deliver advanced deposition and vacuum system solutions with configure-to-order flexibility and sub-nanometer precision for all substrate sizes and materials. With deep scientific expertise, flexible tool platforms, and a collaborative approach, VON ARDENNE empowers semiconductor customers to scale from R&D to high-volume manufacturing and solve advanced coating challenges that conventional vendors can’t touch. For more information, visit https://vonardenne.us/.

    Media Contact:
    Sandy Fewkes, Senior PR Manager

    Kiterocket

    Mobile: (408) 529-9685

    [email protected]


  Products

  • OPTA X Rotary Disc Coating Systems
    With the OPTA X, we offer you a coating system for the double-sided deposition of the most demanding layer systems....

  • With the OPTA X200 and OPTA X300, we offer you highly-productive coating systems. They are suited both for the most demanding optical coating systems and for the precise deposition of, for example, high-performance piezoelectric materials such as AlN and AlScN. This applies especially to multilayer optics with a high number of alternating layers and high-quality layer stacks for microelectronic applications and semiconductor systems.

    The rotary disc systems coat both sides horizontally and are designed, depending on the model, for processing substrates with diameters of 200 mm or 300 mm (including G12 wafers). For optimal coating, the special CARS technology is used. But other process modes such as Meta Mode, reactive or non-reactive sputtering are also available.

    For maximum variability, magnetrons and/or plasma sources can be integrated on up to five ports per coating side. In-situ measurement technology for tracking and correcting the coating progress is also available for optical monitoring.

    Both models are equipped with an automatic handling system. This is modularly constructed and enables safe loading with different substrates, which are guided through the system in adaptable carriers.


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