Cast Aluminum Solutions LLC

Product Features:
200 mm Model Main OD:  228.6 mm (9.00”)
300 mm Model Main OD: 350.0 mm (13.78.00”)
200 mm Model Power: 2238 W @ 240 V, 1681 W @ 208 V (single ph)
300 mm Model Power: 2724 W @ 240 V, 2047 W @ 208 V (single ph)
Max Recommended Operating Temp:  400°C (752°F)
Surface Temp Uniformity: ±0.5% of set point

General Construction:
Aluminum 356 heater body with single cast-in cable heater
Surface Flatness: < 0.0005 in. (0.013 mm)
Vacuum Shaft:  Fully Integrated 85 mm (3.36”) Dia. x 95 mm (3.75”) Long
Shaft has thru-holes for power and TC wires
Temp Sensor:  Dual Junction K-Type Thermocouple w/ Mini Plug

Coating Options:
Bare Aluminum or
Hard Coat Anodize: Complies with MIL-A-8525, Type III, Class 1 specs for Anodic Coatings

Cleaning Options:
Basic IPA Wipe-Down or
Full Class 1000 Cleaning with N2 Drying and Vacuum Bagging

Surface Finish Options:
Flat or Recessed Dish
Radial Grooves
Concentric Rings

Power Lead Options:
Flying Leads (Teflon)
Mate-N-Lok (3 Pin)
CPC Connector (4 Pin)

Appropriate Applications for These Pedestal Heaters:
As a Spare or Replacement Heater
Equipment Engineering & Prototyping
New Process Testing
Situations where Quick Delivery is Critical

For more information about Cast Aluminum Solutions, check www.CastAluminumSolutions.com

Or visit Semicon West 2025, Booth 556.

Cast Aluminum Solutions designs and manufactures the semiconductor industry’s most innovative inline heaters for gases, and circulation heaters for liquids. Heating solutions from CAS cover a wide range of critical semi wafer processing applications:

• Heating DI Water and Solvents for Wafer Cleaning Applications
• Heating Nitrogen Gas and CDA for Drying Processes
• Warming of Carrier Gases and Process Gases which are destined for the vacuum chamber
• Vaporization of Cryogenic Media, where phase change is appropriate
• Heating of Gases for high-volume facility-wide gas delivery systems

Below is a summary of our key inline heater offerings, with power and connection size notes.  For more about any of CAS’s high-performance circulation heaters, check the CAS website, or visit us at Booth 556 in October at Semicon West.

All heater designs from Cast Aluminum Solutions feature an “isolated fluid path” design”. This means your heated media has zero contact with the heating elements, keeping your process liquid or gas contaminant-free. Heated media flows exclusively through the heater’s flow-tube, never contacting any other portion of the heater.

The CAST-X Circulation Heater line has power from 1 to 60 kW, with tube connections ranging from 1/4” to 1”.  The CAST-X Circulation Heater line is very versatile, and is available with a wide range of purity options, terminal enclosure choices, and temperature sensor accessories.  Being a standard, configurable product, CAST-X Circulation Heaters have short delivery timelines and excellent availability.

All the below CAST-X Circulation Heaters have a wetted surface of 316 seamless stainless steel.

Custom alloys and high purity versions are available upon request.

CAST-X 500 Circulation Heater:
Max Power: 1500 W
Connection:  1/4" OD (6.3 mm)
Max Temp:  350°C (662°F)

CAST-X 1000 Circulation Heater:
Max Power: 3000 W
Connection:  5/16" OD (7.9 mm)
Max Temp:  350°C (662°F)

CAST-X 2000 Circulation Heater:
Max Power: 6000 W
Connection:  1/2" OD (12.7 mm)
Max Temp:  350°C (662°F)

CAST-X 2500 Circulation Heater:
Max Power: 15 kW
Connection:  5/8" OD (15.9 mm)
Max Temp:  350°C (662°F)

CAST-X 3000 Circulation Heater:
Max Power: 27 kW
Connection:  3/4" OD (19.1 mm)
Max Temp:  300°C (572°F)

CAST-X 4000 Circulation Heater:
Max Power: 60 kW
Connection:  1" OD (25.4 mm)
Max Temp:  350°C (662°F)

The CAST-X High Temp Circulation Heater brands feature maximum recommended operating temps to 600°C (1110°F).  The CAST-X High Temp Circulation Heater is unique in its temperature capacity, making it the perfect choice for high temperature gas heating processes.

All the below CAST-X High Temp Circulation Heaters have a wetted surface of Inconel 600.

CAST-X High Temp 500 Circulation Heater:
Max Power: 1500 W
Connection:  1/4" OD (6.3 mm)
Max Temp:  600°C (1110°F)

CAST-X High Temp 2000 Circulation Heater:
Max Power: 6000 W
Connection:  1/2" OD (12.7 mm)
Max Temp:  600°C (1110°F)

CAST-X High Temp 2500 Circulation Heater:
Max Power: 14.4 kW
Connection:  1/2" OD (12.7 mm)
Max Temp:  600°C (1110°F)

The PUR-X Inline Heater from Cast Aluminum Solutions is unique in its design, known for being one of the most innovative PFA/PTFE tube heaters on the market. PUR-X features a removeable and replaceable Teflon tube that fits into a precision-milled groove within the heater body. The heater also features an explosion proof terminal enclosure, and Teflon coated heater body, making the design suitable for heating low-flashpoint solvents and high-purity gases.

All the below PUR-X Inline Heaters have a wetted surface of PFA (Teflon).

PUR-X 1000 Inline Heater:
Max Power: 4500 W
Connection:  3/8" OD (9.52 mm)
Max Temp:  235°C (455°F)

PUR-X 2000 Inline Heater:
Max Power: 7900 W
Connection:  3/8" OD (9.52 mm)
Max Temp:  235°C (455°F)

The Universal Solvent Heater from Cast Aluminum Solutions is loaded with an array of performance-enhancing features, designed specifically to warm organic solvents, IPA, NMP, Acetone, and the like.  The heater body is Teflon coated, to protect from caustic splashing. The terminal enclosure is certified explosion proof, and there are 3 integrated temperature sensors.

The main process tube is 3/4" OD 316 seamless stainless steel, electropolished and passivated, with options for welded fittings.  Universal Solvent Heater also features an integrated cooling tube to provide instantaneous temperature reduction, a feature unique to USH.
 

Universal Solvent Heater:
Max Power: 8000 W
Connection:  3/4" OD (19.1 mm)
Max Temp:  200°C (392°F)

The PUR-Therm Gas Delivery Heater is a very compact, high-purity heater, designed to warm carrier gases and process gases destined for the wafer chamber.  In many cases, the PUR-Them Heater can effectively replace traditional gasline heaters.

PUR-Therm has a wetted surface of high-purity 316 seamless stainless steel, low-Ra electropolished and passivated, with a proprietary inert gas purge process implemented in manufacturing. The tube entry and exit have orbitally-welded VCR fittings, so its easy integrate into almost any 1/4" gas delivery system.

PUR-Therm Gas Heater:
Max Power: 1500 W
Connection:  1/4" OD (6.3 mm)
Max Temp:  300°C (572°F)

In addition to these standard heater designs, Cast Aluminum Solutions designs and manufactures custom-engineered heated components.  CAS is a leading manufacturer of pedestal heaters, chamber ring heaters, and customer-proprietary thermal components for the semiconductor wafer processing market.

For more information about Cast Aluminum Solutions, check www.CastAluminumSolutions.com

Or visit Semicon West 2025, Booth 556

Cast Aluminum Solutions is a leader in developing, testing and manufacturing highly-engineered devices for wafer processing applications. CAS provides critical in-chamber heating and cooling components, innovative fluid and gas heaters, and unique front-end processing solutions.  We are renowned for our advanced-function pedestal heaters, which play a pivotal role in some of the industry’s most advanced wafer processing applications.

The below features represent advancements in pedestal heater technology CAS provides, with the goals of increasing throughput, generating highly-consistent process results, and maintaining compatibility with next-generation wafer processing approaches.

• Multiple Heating Zones: To enhance temperature uniformity or create custom thermal profiles, CAS offers in-chamber wafer heaters with multiple thermal zones.  This approach allows for multiple heating elements, with varying levels of watt density (outer rim vs center zone, for example). CAS can provide multi-zone designs on cast-in as well as non-cast pedestals.

• Integrated Cooling Functions:  To shorten cycle times, cooling functions can be integrated into many pedestal designs. The approach is compatible with single zone and multi-zone pedestals. Thermal modeling software is used to determine optimal cooling tube dimensions and inclusion patterns, relevant to either a gas and liquid-induced cooling action.

• Gas Channel Features: CAS has substantial experience designing and manufacturing pedestal heaters containing internal flow channels: these channels deliver gas to the working surface via small vent holes. CAS Team has the expertise in this specialized field to create effective designs with minimal iterations.

• Not Just Aluminum, Not Just Castings:   Cast Aluminum Solutions, as our name implies, designs and manufactures custom-engineered aluminum castings, often with integrated components. With a cast semi chuck, the temperature uniformity can be excellent, the heater lifespan very long, with a failure rate very low. For higher temps, 304 or 316 stainless, 600 or 625 Inconel, or even Nickel or Hastelloy may be desirable, depending on max temp and uniformity requirements, chamber gas chemistry, desired cool-down time, etc. CAS can indeed offer a multitude of alloys for most of products. Non-aluminum parts will often utilize our proprietary Interference Fit Construction. The IFC process allows for operating temperatures up to 650°C (1200°F), without substantial sacrifice of heater lifespan or temperature uniformity. Features such as cooling tubes, gas channels, and special vacuum shafts can also be included.

The CAS Engineering Team leverages a wealth of state-of-the-industry techniques and platforms to design, prototype, test, manufacture, and deliver on the promise of ‘the industry’s highest-performing pedestal heaters’. Through our dedicated New Product Development Team, and a newly-constructed R&D Technical Center, these are some of the tools we employ:

• Finite Element Analysis:  This Ansys application allows CAS Engineers to model heat transfer across a tool’s surface, providing predictive wafer temperature and uniformity data, as well as heat-to-cool cycle time information. FEA, used in conjunction with linked applications, works to optimize designs on shorter timeframes vs making iterative prototypes.

• Computational Fluid Dynamics: CFD models play key roles in designing molds for cast parts and finely tuning casting variables. A mold’s dimensional variables can be modified, pour rates and fill temps modified, with the resulting CFD models then show reliable virtual results. The benefit is a reduction of physical mold modifications and a shorter path from prototype to perfected design.

• SolidWorks 3-D CAD Design:  This industry-standard 3-D CAD software package is more than a powerful design tool: it facilitates the transfer of dimensions, designs and application details across multiple platforms. CAS Engineers can easily cross-test designs in FEA, CFD, Mazatrol or PartMaker.

• Vacuum Chamber Testing:  The CAS R&D Tech Center features a large vacuum chamber, capable of testing semi pedestals ‘as our customers use them.’  Infrared Imaging and probe based temperature monitoring can be integrated with vacuum tests.

• Performance & Failure Analysis:  Our R&D Tech Center features Variac voltage transformers. We can simulate power surges and dips, testing component performance and survivability in real-world situations. Data logging (which can include details on duty cycle, heater set point, surface temperature, amp draw, and more) can be dovetailed, creating a full performance picture.

• X-Ray Imaging:  Our in-house X-ray technology helps us understand what’s truly happening inside cast parts. X-ray imaging can confirm or reject assumptions regarding the position of integrated (cast-in) components.

• ISO Class 6 Cleanroom:  Chamber parts and other high-purity components can be assembled and packaged at CAS’s in-house ISO Class 6 Cleanroom. As part of our R&D Tech Center, the integrated cleanroom ensures components comply with required standards for purity.

Headquartered in Batavia, IL, Cast Aluminum Solutions designs and manufactures precision-engineered thermal products for the global semiconductor industry, serving OEMs and end-users worldwide. 

For more information about Cast Aluminum Solutions, see our website:  

www.CastAluminumSolutions.com

Or visit CAS at Semicon West 2025, Booth 556