The future of plasma control
Synertia® is the RF power system that ensures powerful command and control of plasma conditions at highest speed level. The Synertia® platform consists of RF Generators and RF Matching Networks with a wide range of frequencies and power levels.
Comet’s integrated RF power delivery platform offers a new level of real-time data insight, which improves the stability of the plasma processes. It reduces downtime, boosts yield and enhances productivity. Synertia® enables the user to manage the complexities of multi-layer next-generation and atomic-scale plasma processes integral to the production of memory and logic microchips.
RF Power Generator Synertia® RFG
Users fully control the unique performance accelerators of Synertia® RF generators, including:
- Multilevel pulsing that is tunable and highly configurable to deliver precise and repeatable control of the plasma.
- Integrated advanced functionalities, like the Auto Frequency Tuning (AFT) algorithm that allows to quickly adapt to the plasma process, and arc management to mitigate wafer damage and boost productivity.
- Advanced visualization of critical measurement and control parameters. This enables acceleration of process optimization and speeds time to solution. A wide variety of smart data sets for debugging, troubleshooting, and targeted analytics.
- Additionally, the integrated measurement studio saves money in lab equipment, and applications like the advanced oscilloscope functions allow direct access to crucial process parameters.
Higher yield is the result of Synertia®’s fast and agile process control, which delivers superior repeatability, faster tuning, and custom wave-shaping.
Matching Network Synertia® RFM
Comet RF design engineers create a full range of industry leading matching network solutions that meet or exceed your specifications and time to market.
Profound know-how in RF circuit modeling and design combined with outstanding Comet vacuum capacitors guarantee highest performance, repeatability and reliability of your tools. Precise sensors and an enhanced tuning algorithm in the matching network ensure consistent and stable plasma processes.
You get powerful command and control with Comet matching networks:
- Unique modular design that provides mix-match of features and seamless integration of matchbox and generator.
- Wide-band frequency range sensors with high fidelity and sensitivity over a wide frequency range.
- Advanced single, dual, and multi-level pulsing.
- Custom tuning parameters: Gamma, VSWR, Z target tune point, etc.
- Advanced motion control within a wide range of driving capability to accommodate various Vacuum Capacitor types.
Visit our booth and learn more about Comet solutions to improve process repeatability, yield and throughput.