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RION CO., LTD.

Tokyo,  Japan
http://www.rion.co.jp
  • Booth: 6551

Find Your Particle Counting Solutions with RION!

Overview

RION Air and Liquid Particle Counting Systems - Booth 6551

0.02um Sensitivity for Chemicals and UPW!

RION Co., Ltd. of Tokyo, Japan is a world-leading producer of Laser Particle Counting systems featuring state-of-the-art noise reduction technology and superior detection efficiency. RION Particle Counting systems are technologically superior and highly reliable, allowing for higher detection efficiency than competitor models. RION Liquid Particle Counters are user-friendly, responsive, and versatile in both batch and inline modes. All systems are equipped with a standard communication interface for computer operation and offer compatible options for all liquids from UPW to strong acids. Other standard equipment, including a built-in printer, memory card reader, LCD touch panel display, integrated Pulse Height Analyzer, and one-button operation all provide the user with unparalleled flexibility. RION also offers a variety of Airborne Particle Counters that fit a wide range of applications.

MGN International is RION's exclusive factory representative in North America.

Come see our latest products at SEMICON West.


  Products

  • RION KS-20F (0.02um) Liquid Particle Counter
    Measures UPW, Chemicals (solvents, blends, acids) Detects particles to 0.02 µm Compatible with Hydrofluoric acid With abundant options, it can be used for both in-line and off-line measurement...

  • https://particle.rion.co.jp/english/products/ks-20f.html

    Specification

    Optical system Light-scattering method
    Light source Diode pumped solid state laser (wavelength: 532 nm, rated output 1.5W)
    Materials of parts exposed to sample fluid Sapphire, PFA
    Measurement size range 4 channels (Factory default):≥0.02 µm, ≥0.03 µm, ≥0.04 µm, ≥0.06 µm
    Setting range 0.02 µm to 0.08 µm
    Flow rate 10 mL/min
    Maximum particle number concentration 50,000 particles/mL (coincidence loss 10%)
    Power requirements 100 to 240 V AC, 50/60 Hz, Approx. 250 VA
    Dimensions Approx. 235 (H) x 552 (W) x 340 (D) mm
    Weight Approx. 18 kg
  • RION KC-52A (0.3um) Hand Held Air Particle Counter
    For cleanroom measurements and for a variety of contamination control applications. Meets basic performance required by ISO 21501-4 (JIS B 9921) *ISO 21501-4:2018 Compatible Calibration is factory option...

  • Specification

    Optical system Light-scattering method
    Light source Laser diode (wavelength 780 nm, rated output 35 mW)
    Measurement size range 6 channels: ≥0.3 µm, ≥0.5 µm, ≥1.0 µm, ≥2.0 µm, ≥5.0 µm, ≥10.0 µm
    Flow rate 2.83 L/min
    Maximum particle number concentration 140 000 000 particles/m³ (coincidence loss 10%)
    Power requirements Built-in battery or AC adapter (100 V to 240 V AC, 50/60 Hz)
    Dimensions Approx. 307 (H) × 93 (W) × 54 (D) mm
    Weight Approx. 680 g
  • RION KS-42 Series Liquid Particle Counters
    KS-42A/AF (0.1um to 0.5um), KS-42B/BF (0.2um to 2.0um), KS-42C (0.5um to 20um), KS-42D (2um to 100um) Applications includes: chemicals (solvents, acids, blends), filtration studies, parts cleaning. Can be used for both in-line and off-line measurement....

  • Specification for KS-42A/AF

    Optical system Light-scattering method
    Light source Laser diode (wavelength: 830 nm, rated output 200 mW)
    Materials of parts exposed to sample fluid Synthetic quartz, PFA
    Measurement size range 5 channels (Factory default): ≥0.1 µm, ≥0.15 µm, ≥0.2 µm, ≥0.3 µm, ≥0.5 µm (≥1.0 µm support available as option)
    Setting range: 0.1 µm to 0.5 µm
    Flow rate 10 mL/min
    Maximum particle number concentration 1,200 particles/mL (coincidence loss 5%)
    Power requirements DC12 V (Supplied by KE-40B1)
    Dimensions Approx. 125 (H) x 240 (W) x 151 (D) mm
    Weight Approx. 4 kg

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