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ATS-Advanced Thermal Sciences

Anaheim,  CA 
United States
https://atschiller.com/
  • Booth: 7322

Stop in, Chill out with ATS, schedule a free design review

Overview

Advanced Thermal Sciences Corporation (ATS) is a leading supplier of temperature controll systems (TCS).

Markets served include semiconductor/microelectronics, solar, laser, and more.

ATS manufactures standard and custom engineered products to provide cutomers with the right solution.

With over 25 years in the temperature controll industry

we are your one source for highly reliable, compact, and efficient temperture controll systems 

  Products

  • Advanced Thermal Sciences Product Groupings
    Our temperature control systems are installed in the leading manufacturing facilities throughout the world. We can custom design a chiller or heat-exchanger tailor made for your process. ...

    • We offer Co2 chillers that are ECO-Friendy (GWP=1) in our GX-series products Now with Boost technology -  Ultra low cryo chillers -60C and colder across TCX, MC/MCR platforms - Single Channel or Multiple channel options avaiable.     

Categories

204 MEMS Equipment
  • Deep RIE etching; Dry Etching
    • 207 Process Equipment
  • Chemical Mechanical Polishing
  • Deposition; (CVD, PVD, ALD, Plating)
  • Deposition; PVD; Sputtering; Evaporation Equipment
  • Epitaxy Equipment
  • Etching; Stripping; Ashing - Dry and Wet Equipment
  • Ion Implantation Equipment
  • Ion; E-Beam Milling Etching Equipment
  • Lithography/Exposure
  • Thermal Processing
    • 208 Test Equipment
  • Burn-In Accessory Systems
  • Environ. Stress Systems: Temp.; Humidity; Pressure; HAST
  • Functional Test Systems
  • Logic Test Systems
  • Optical Test Systems
    • 301 Chemicals & Solids
  • DI; UP Water
  • Other Specialty Chemicals
    • 309 Test Materials
  • Boards: Burn-In; Performance (Low/High Temp and Ceramic)
    • 401 Sub-systems
  • Pumps, for Fluids
    • 500 Factory Monitoring & Control Systems (FMCS)
  • Chemical; Pure Water; Fluid Monitoring & Control Systems
    • 501 HVAC, Temperature, Humidity, Contamination Control
  • HVAC; Temperature; Humidity Systems and Control
    • 700 Manufacturing Services
  • Repair; Rebuild; Install Equipment; Maintenance Svcs; Spares
    • 701 Manufacturing Services or Consulting
  • Assembly
  • Equip; Hardware; Product Design, Integration and Mfg.
  • Manufacturing Process Support and Development

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