Brumley South, Inc.

Mooresville,  NC 
United States
http://www.brumleysouth.com

• Booth: 7129

Alternate Source: Best in Class! For Tencor Surfscan Parts.

Overview

For the past 30 years, Brumley South has been providing Metrology support to the semiconductor industry!

Tencor Surfscan Wafer Inspection Systems

6100, 6200, 6400 Series — 

NanoMetrics Thin film tools.

NIST PSL Calibration Standards for Wafer Inspection Systems.

ADE Bow/Warp Dimensional tools

Pentagon/Dryden Q3 Particle Counters.

  Press Releases

• Brumley South adds Life Extension Upgrades for Tencor Surfscan Wafer Inspection Systems (Sep 05, 2025)

  For Immediate Release
  Life Extension Upgrades for Tencor Surfscan Wafer Inspection Systems

  Mooresville, NC — August 13, 2025 — Brumley South, Inc., a global leader in remanufactured KLA Tencor Surfscan 6000 Series wafer inspection systems and spare parts, today announced an expanded U.S.-based, tariff-free inventory and enhanced upgrade programs designed to keep fabs running longer, faster, and at lower cost.

  Why It Matters for Legacy Fabs

  • Critical spares available now – redesigned replacement parts for the Surfscan 6000 Series.
  • Fast delivery – U.S. inventory ready to ship with short lead times.
  • 10 years of guaranteed support – ensuring your Surfscan 6000 tools remain productive through the next decade.

  What’s New

  Brumley South has re-engineered Surfscan system boards, assemblies, and subcomponents to extend service life by 10 years. A range of upgrades are now available, with more coming soon: 

  • Solid-state laser upgrade
  • Solid-state hard drive replacement
  • Laser alignment & centering targets
  • Lead screw nut field-replacement kit
  • Trenton CPU system board upgrade
  • Dallas security key replacement
  • PS/2 mouse upgrade
  • Legacy tool print server
  • Cassette placement switch

  All upgrades and spares are available for immediate shipment, minimizing downtime and maximizing wafer throughput.

  Executive Perspective

  “Since 1992, our mission has been to keep customers’ metrology assets reliable, predictable, and cost-effective,” said Tom Norment, President of Brumley South. “With expanded in-stock parts, preventive maintenance options, and a 10-year legacy support program for the Surfscan 6000 Series, we give fabs a clear path to higher uptime and deferred capital expense—without sacrificing data integrity or tool correlation.”

  Supported Models

  Surfscan 6100, 6200, 6220, 6230, 6400, 6420, 6430

  Next Steps for Customers

  • SEMI/FOA members: ask about exclusive discounts.
  • Join our VIP Surfscan Support Buyer List.
  • Schedule a preventive maintenance and tool health assessment.
  • Lock in your 10-year legacy support plan today.
  • For urgent issues, contact BSI Technical Support.

  About Brumley South, Inc.

  Founded in 1992, Brumley South is a SEMI Fab Owners Alliance Support Vendor serving fabs worldwide with parts, technical support, refurbished systems, equipment sourcing, and in-house production of PSL NIST-traceable calibration standards. Our expertise covers KLA Tencor wafer inspection systems, profilometers, ADE, Nanometrics, Dryden QIII, and Pentagon QIII Plus. Brumley South helps fabs extend tool life, reduce cost per wafer, and maintain peak uptime.

  Media & Customer Contact:
  Thomas Norment
  Brumley South, Inc.
  Phone: 704-664-9251
  Email: [email protected]

  Rev 09/25

• Brumley South Expands Inventory with 18 Additional Tencor Surfscan 6000 Series Systems to Meet Global Demand (Sep 05, 2025)

  Brumley South Expands Inventory with 18 Additional Tencor Surfscan 6000 Series Systems to Meet Global Demand

  Mooresville, NC — September 13, 2025 — Brumley South, Inc., a global leader in legacy semiconductor metrology solutions, has secured 18 Tencor Surfscan 6000 Series wafer inspection systems from two active fabs. This acquisition strengthens Brumley South’s position as the primary alternate-source supplier of remanufactured Surfscan systems, ensuring fabs worldwide can maintain tool correlation, data integrity, and throughput without the risks of adopting unproven alternatives.

  The Tencor Surfscan 6000 Series remains the industry standard for wafer inspection due to its proven reliability, straightforward operation, and consistent data output. With global fabs under increasing cost pressure, these systems continue to offer the most efficient path to maintaining uptime and production quality.

  “Since 1992, Brumley South has supported fabs in extending the life of critical metrology systems,” said Tom Norment, President of Brumley South, Inc. “By securing these Surfscan 6000 units, we’re helping customers avoid downtime, control costs, and rely on tools with decades of proven performance. Our expertise and global operations ensure that fabs have access to fast, effective, and cost-efficient support.”

  ---

  Supporting Metrology Performance

  Alongside Surfscan system supply and refurbishment, Brumley South provides:

  • Custom PSL Calibration Wafer Standards — manufactured in-house and in high demand for tool qualification and QA.
  • Comprehensive Support Services — including parts supply, technical support, controller upgrades, and refurbished system sales.
  • Coverage Across Legacy Systems — expertise in KLA-Tencor, ADE, Nanometrics, Dryden QIII, Pentagon QIII Plus, and other critical wafer inspection platforms.

  ---

  About Brumley South, Inc.

  Brumley South is a Semi.ORG Fab Owners Alliances Support Vendor serving thousands of clients worldwide. Since 1992, the company has specialized in supporting legacy semiconductor metrology and inspection systems with parts, technical services, refurbished equipment, and calibration standards. Brumley South’s in-house PSL NIST Calibration Wafer Standards deliver fast, cost-effective solutions to help fabs maintain qualification and compliance.

  ---

  Media & Customer Contact:
  Thomas Norment
  Brumley South, Inc.
  Phone: 704-664-9251
  Email: [email protected]

• Brumley South Expands PSL NIST Contamination Standards to Support Global Wafer and Mask Inspection QA (Sep 05, 2025)

  FOR IMMEDIATE RELEASE
  Contact:
  Thomas Norment
  Brumley South, Inc.
  Phone: 704-664-9251
  Email: [email protected]

  ---

  Brumley South Expands PSL NIST Contamination Standards to Support Global Wafer and Mask Inspection QA

  Mooresville, NC — September 13, 2025 — Brumley South, Inc., a global leader in semiconductor metrology support, today announced the expansion of its PSL NIST-certified Contamination Standards line to meet growing worldwide demand. These standards are designed for developing, qualifying, and calibrating wafer and photomask inspection systems, ensuring fabs achieve the highest levels of quality assurance and compliance.

  Brumley South’s contamination standards are NIST traceable, with particles of specified size, composition, and count deposited on substrates such as bare silicon wafers or photomasks. Standards can be produced on bare, film, or patterned wafers of any size, providing unmatched flexibility for fabs with diverse toolsets and QA requirements. The company’s expanded live inventory allows for faster delivery, helping customers reduce downtime while maintaining qualification schedules.

  “Since 1992, Brumley South has built its reputation on listening to fabs and responding to their most pressing challenges,” said Tom Norment, President of Brumley South, Inc. “The expansion of our PSL NIST Contamination Standards is a direct investment in our customers’ ability to maintain throughput, reduce costs, and extend the life of their inspection systems.”

  This investment underscores Brumley South’s commitment to supporting global fabs with both commercial off-the-shelf (COTS) and custom contamination standards, ensuring customers have reliable, cost-effective options to maintain leading-edge QA.

  ---

  About Brumley South, Inc.

  Brumley South is a Semi.ORG Fab Owners Alliances Support Vendor serving thousands of clients worldwide. Since 1992, the company has specialized in supporting legacy semiconductor metrology and inspection systems with parts, technical services, refurbished equipment, and calibration standards. Brumley South’s in-house PSL NIST Calibration Wafer Standards deliver fast, cost-effective solutions to help fabs maintain qualification and compliance.

  Products