Heidelberg, Germany—Heidelberg Instruments proudly celebrates the 10th anniversary of the MLA 150 Maskless Aligner—a breakthrough that has redefined high-resolution lithography in cleanrooms around the world. Since its launch in 2015, the MLA 150 has provided researchers and engineers with a flexible, mask-free alternative to traditional photolithography, transforming microfabrication across both academia and industry.
“The MLA 150 Maskless Aligner was created to address bottlenecks in multi-user cleanrooms caused by aging mask aligners and time-consuming photomask production. Heidelberg Instruments envisioned a direct-write solution with better performance than a mask aligner—without the delays. The result: fast turnaround, high accuracy, and exceptional ease of use”, states Steffen Diez, COO Heidelberg Instruments.
At the heart of the MLA 150 is a digital micromirror device (DMD), acting as a dynamic mask, paired with solid-state light sources and advanced alignment capabilities. This combination made the system a game-changer from day one. With exposure times under 10 minutes, full process cycles under 30 minutes, and user training completed in under an hour, the MLA 150 quickly set a new benchmark for R&D lithography. “The MLA 150 is one of the most consistently utilized tools in our cleanroom,” says Dr. Tom Peach, Senior Process Engineer at Cardiff University. “Its flexibility and ease of use have made it a cornerstone of our lithography workflows.” By enabling users to go from digital design to a perfectly patterned substrate in minutes, the MLA 150 empowers rapid innovation in fields such as quantum devices, MEMS, micro-optics, and life sciences.
Refined through close collaboration with leading institutions—including EPFL, the Kirchhoff Institute for Physics (KIP) at Heidelberg University, and the Harvard Center for Nanoscale Systems (CNS)—the MLA 150 quickly proved its value. At KIP, for example, it enabled a threefold increase in yield for complex SQUID (superconducting quantum interference device) sensor fabrication, demonstrating its transformative impact. While initially embraced by research labs, the system’s versatility and cost-efficiency soon attracted industrial users seeking agile solutions for rapid prototyping and small-series production. From foundational research in quantum materials to the development of life-saving biosensors, the MLA 150 has been a silent partner in countless discoveries.
In 2025, Heidelberg Instruments introduced a major upgrade to the MLA 150, pushing the minimum feature size to 450 nm and expanding its capabilities for high-precision applications.
Today, the MLA 150 is a trusted workhorse in more than 250 cleanrooms worldwide. As Heidelberg Instruments celebrates this milestone, it also honors the global community of users, engineers, and partners who have helped shape the MLA 150 into a transformative platform—one that continues to push the boundaries of what is possible in microfabrication.
Explore the history marking a decade of the MLA 150 and take part in the special contest celebrating its 10th anniversary.