Wafer Processing Furnaces for Semiconductors & More
Overview
ECM Greentech, ECM Group subsidiary, develops high-tech furnace systems for photovoltaic, energy storage, semiconductors, vacuum heat treatment & advanced crystal growth. Brands: ECM Greentech, Semco, Annealsys, Jipelec and Cyberstar.
ECM GREENTECH offers three ranges of furnaces: silicon ingot casting installations using directional solidification for PV silicon ingots, high temperature vacuum furnaces for heat treatment, and semiconductor furnaces (for diffusion, oxidation, doping & other processes) for wafer/cell manufacturing (up to 300mm wafers).
ANNEALSYS offers a versatile range of rapid thermal processing & direct liquid systems for research production applications in silicon/compound semiconductors. Brands: Jipelec (entry level RTP/RTA systems) & Annealsys (advanced configurations and ALD/DLI).
CYBERSTAR crystal growth equipment (Czochralski Pullers, LPE, Mirror furnaces, Bridgman, Kyropoulos, etc) are ideal for advanced crystal growth for sapphire, ruby, oxides, fluorides & other exotic materials.
Meet with Semco Technologies (ECM Group subsidiary) for your gas flow control components & e-chucks!