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Overview
Fortrend Engineering established in Sunnyvale CA in 1979 providing automation solutions to the Semi-conductor Industry. In 1996 invented the 200mm SMIF Arm, and built the first SMIF production line for HP. Since 2002 Fortrend has become a leading force in Reticle handling equipment designing and building Reticle sorters, SMIF pod openers for OEM customers, Mask storage systems, upgrading existing process tools to SMIF compatible tools.
Fortrend has launched a series of ISO Class 1 SMIF Reticle handling tools for the EUV and 193 Reticle handling market.
Fortrend SMIF pod openers meets the SEMI 152 EUVL SMIF pods opening requirements:
The PLUS 500 G4 SMIF arm ISO Class 1 system enables a Reticle to be picked up from a SMIF pod rotated 360° and/or tilted up to 270° to be placed on a host tool stage.
Fortrend will be showing our latest AGV's for 300 and 450 mm FOUP handling