Single Wafer Thin Film Processing Systems
Overview
Nano-Master, Inc. products are used in LED, MEMS, Optoelectronics, Nanotechnology, Photovoltaic, Semiconductor and Space Simulation applications. Nano-Master products include PECVD systems for deposition of SiO2, Si3N4, DLC, CNT and Graphene; PA-MOCVD Systems for InGaN and AlGaN; Sputtering Systems (reactive, co-sputtering, combinatorial); Thermal and E-beam Evaporators, Ion Beam and Reactive Etching Systems; Atomic Layer Etching, Atomic Layer Deposition Tools; Thermal Vacuum Systems; Megasonic Cleaning Systems and Photoresist Stripping Equipment.
Deposition
E-Beam and Thermal Evaporation, PECVD, PLD, DLC, DC & RF Sputtering, Ion Beam Sputtering
Etching
RIE, DRIE, ICP, Ion Beam Milling, RIBE, Plasma, ALE
Growth
ALD, PA-MOCVD, CNT, Graphene
Surface Treatment
Ion Beam, PIII, Plasma, RTP
Cleaning
- Dry: Ion Beam, Plasma
- Wet: Megasonic, Brush, SC1, SC2, Piranha, O3DIW
Other,
Device Testing System for Space Simulation, Heated Platens, Plasma Sources, Resist Stripping Systems