Overview
Sono-Tek’s ultrasonic coating technology is used for applications in which material consumption, uniformity, repeatability, and control are required. Our ultrasonic technology is well known in the semiconductor industry for precision photoresist coatings. Sono-Tek’s SPT200 photoresist coating machine is the perfect tool for providing uniform photoresist coverage of deep well topographies such as MEMs and other challenging applications where spin coating is inadequate. Our new Wafer Handling System is offered for higher automation and throughput levels of 4-8” wafers with automated wafer load. Other spray applications include packaging coatings such as polyimide, EMI materials, flux dispensing for flip chip applications as well as thin film solar, glass, and functional coatings for displays such as TCO layers, nano suspensions (CNT, graphene, nano-wires), OPV polymers, AR, and Perovskite layers. Visit www.sono-tek.com/industry/semiconductor/mems-semiconductor/ for more information.