Teksoli, Inc.

Santa Clara, CA
United States
http://www.teksoli.com

Booth: 566

Teksoli provides Technical Support for SP1 and SP2 KLA tools

Overview

Teksoli provides OEM trained expertise for SP1 and SP2 KLA equipment:

On-site repair
Level 4 Technical support
Preventive Maintenance
Spare Parts availability: PCB's, Optical assemblies
Consumables: Lasers, PMT's, Chucks, End-Efectors, etc.
System Installation
SP1 and SP2 Training (SP2 at your facilities)
Consulting

Categories

203 Inspection & Measurement Products

Defect; Particle; Contam. Detection/Review/Inspect.

Film Thickness; Uniformity Measurement; Ellipsometer

Line Width; Critical Dimension (CD) Measurement

Metrology; Topology; Nanotopography; Flatness; Cryst.Orient.

Overlay Measurement

Particle Monitors; Analyzers - Airborne or Liquid

Resistivity Measurement; 4 point probe; Sheet resistance

Thermal Sensing, Measurement, Analysis

208 Test Equipment

Handlers; Positioner Systems

700 Manufacturing Services

Measurement; Inspection Service

Repair; Rebuild; Install Equipment; Maintenance Svcs; Spares

805 PV Services

Education, Training

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