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Ushio, Inc.

Tokyo,  Japan
https://www.ushio.com/contact-us/
  • Booth: 1435

For litho, surface treatment, or heating, visit USHIO now!

Overview

Established in 1964, USHIO INC. (TOKYO: 6925) is a leading manufacturer of light sources such as lamps, lasers, and LEDs, in a broad range from ultraviolet to visible to infrared rays, as well as optical equipment that incorporate these light sources. 

USHIO exhibits the following products:

  • UX-series photolithography systems
  • Excimer 172nm UV surface treatment systems
  • Halogen lamps for heating process of semiconductor
  • Flash lamp annealing equipment
  • LED annealing equipment

Categories

1 FLEX
  • 2D, 2.5D or 3D IC Design
  • Advanced Packaging
  • MEMS
  • Power & Batteries
  • Sensors
  • Substrates
  • Tools & Equipment
    • 200 Packaging and Assembly Equipment
  • Cleaning; Washing Equipment for Assembly & Packaging
  • Litho for WLP: Bumping; 3D Interconnect Aligners
    • 203 Inspection & Measurement Products
  • Instruments; Bench Top Test
    • 204 MEMS Equipment
  • Double sided mask aligner
    • 207 Process Equipment
  • Cleaning; Washing Equipment for Assembly & Packaging
  • Deposition; (CVD, PVD, ALD, Plating)
  • Deposition; PVD; Sputtering; Evaporation Equipment
  • Epitaxy Equipment
  • Etching; Stripping; Ashing - Dry and Wet Equipment
  • Ion Implantation Equipment
  • Lithography/Exposure
  • Thermal Processing
    • 400 Components, Parts & Accessories
  • Heating elements and other Furnace components
  • Lamps (non Lithography), all type UV; LED and other
  • Lamps for Lithography

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