Dimension FastScan Pro
The Dimension FastScan Pro delivers the highest metrology-level speed and performance of any industrial AFM available today. The system enables automated or semi-automated measurements while ensuring the utmost ease of use and the lowest cost per measurement for quality control, quality assurance, and failure analysis.
Features:
FastScan Pro utilizes an open-access platform, large- or multiple-sample holders, and numerous ease-of-use features to provide flexible high-performance nanoscale metrology for industrial QA, QC, and FA applications. The system delivers automated 2-inch to 12-inch wafer measurements for semi, data storage and HB-LED. It features increased XY sample travel for full access to 200mm wafers or multiple samples in 200-mm diameter area, with optional chucks for 300-mm wafers. The system also provides the choice between a high-throughput 5-10x FastScan scanner for topography, roughness and other metrology analyses, or an Icon scanner with 90µm scan range for larger scans and high-accuracy topography performance.
ContourX Series - 3D Optical Profilometer
The ContourX Optical Profilometer sets a new benchmark for accurate and repeatable non-contact surface metrology at a best-in-class price point. The small footprint system offers uncompromised 2D/3D high-resolution measurement capabilities in a streamlined package that incorporates decades of proprietary Bruker white light interferometry (WLI) innovation. Next-generation enhancements include a new 5 MP camera and updated stage for larger stitching capabilities, and a new measurement mode, USI, for even greater convenience and flexibility for precision machined surfaces, thick films, and tribology applications. You will not find a benchtop system with better value than the ContourX.
Fast and repeatable 3D Metrology
- Industry-best Z resolution offers constant, precision measurements, independent of magnification
- Largest standard field of view
- Compact, vibration-tolerant design for highest stability and repeatability
Superior Measurement and Analysis
- Easy-to-use interface for quick and accurate results
- Extensive library of filters and analysis options for roughness, surface texture, and critical dimension
- Customized analysis reporting to industry standards, such as ISO 25178, ASME B46.1, ISO 4287
Applications:
- Roughness (Polished Glass, Oily Material, Photoresist, Silicon etc)
- Warpage
- Curvature
- Topography
Hysitron TI 990 TriboIndenter
Bruker's next-generation Hysitron TI 990 TriboIndenter® sets new standards for performance, flexibility, and usability in nanomechanical and nanotribological characterization. A comprehensive advancement of Bruker’s industry-leading TriboIndenter platform, every aspect of TI 990's measurement and analysis process features updated technologies designed to remove the normal limitations of nanoindenter systems. As such, this system features the most measurement modes available and delivers high-precision measurements in the broadest range of laboratory environments.
The TI 990 powerful base configuration provides a comprehensive understanding of material behavior at the nanoscale
- Quantitative nanoscale-to-microscale indentation
- Nanoscratch
- Nanowear
- High-resolution in-situ scanning probe microscopy (SPM) imaging
- Dynamic nanoindentation and high-speed mechanical property mapping
Stylus Profiler
Dektak Pro® Stylus Profiler features a revolutionary design that enables even measure single-nanometer step heights and achieve better than 4 angstrom repeatability. This major milestone in stylus profiler performance is the culmination of fifty years of Dektak® innovation and industry leadership. Through its combination of industry firsts, Dektak Pro delivers the ultimate in performance, ease of use and value to enable better process monitoring from R&D to QC. The technological breakthroughs incorporated in Dektak enable critical nanometer-level surface measurements including the microelectronics, Film Coatings, Life Sciences.
Working Principal: Stylus Profiler measured film thickness by contact stylus scanning
- Stylus force 1-15 mg, with 0.03 mg low force option
- The Dektak Pro’s self-aligning styli enables effortless tip exchange
- Low Inertia sensor (LIS 3)
- Smart electronics reducing errors and uncertainty in high-precision measurements.
- Single arch design provides breakthrough scan stability
- Vision 64 operation and analysis software
Large-Sample analysis tool - Application for high throughput, accurate QA/QC!
The Dektak XTL builds upon over 50 years of stylus expertise and application customization for production facilities
to meet the stringent industry roadmaps of both today and tomorrow. The 300-millimeter, high-accuracy
encoded XY staging gives manufacturers a reliable tool to meet stringent gage R&R requirements.
Other hardware features include:
- Single-arch architecture and integrated vibration isolation for industry-leading performance
- Quick-change self-aligning stylus
- High-accuracy encoded XY stage for faster automated data collection
- N-Lite low force with Soft Touch technology and 1mm measurement range can be used simultaneously to measure delicate and high-vertical range samples
- Dektak’s Dual Camera Control with high-magnification dual view cameras offers enhanced spatial awareness. Point-and-click positioning in the live video allows operators to quickly place samples at the right location for quick and easy measurement setup and automation programming