• Pressure control panel for hazardous gases and ultra high purity gases from grade 6.0
• SBE: purge- and connection block or SR: pigtail and single valves with
- manual waste gas valve (HPV)
- pneumatic process gas valve (HPI)
- manual purge gas valve (PGI)
• Check valve to prevent process gas from fl owing back into the purge gas line
• Pre-filter
• Pressure regulator with tied diaphragm
• Burst disc with burst disc monitoring
• Leak test port for leak test or vacuum
• Stainless steel valves for manual or automatic (pneumatic) shut-off
• Minimized purge volume (SBE)
• Electro-polished surfaces (gas wetted)
• Clearly legible handwheel position indication (on/off )
• 100 % Helium leak tested
• Assembly in clean room class ISO 5.0
• Modular design with many options